Infineon Technologies Ag

Marijn Van Os

Boris Kirillov

Wojciech Kudla

Harm Wichers

A photodetector device includes a photodetector array comprising an array of photodetectors and a plurality of metal structures arranged between photodetectors of the array of photodetectors, wherein the plurality of metal structures are arranged in a first pattern; and a transparent substrate comprising a plurality of diffusion structures being patterned according to a second pattern that matches the first pattern. Each diffusion structure of the plurality of diffusion structures is configured to redirect light that is incident thereon. Additionally, the transparent substrate and the photodetector array are coupled together such that the first pattern is aligned with the second pattern and the plurality of diffusion structures covers the plurality of metal structures.

Optical crosstalk mitigation for a detector array in an optical receiver

A method of manufacturing a photodetector device is provided. The method includes providing a photodetector array comprising an array of photodetectors and a plurality of metal structures arranged laterally between photodetectors of the array of photodetectors, wherein the photodetectors are co-planar with the plurality of metal structures, and wherein the plurality of metal structures are arranged in a first pattern; applying an antireflective coating to a surface of a transparent substrate, the antireflective coating being patterned according to a second pattern that matches the first pattern; aligning the transparent substrate over the photodetector array such that the first pattern is aligned with the second pattern; and coupling the transparent substrate to the photodetector array such that the antireflective coating covers the plurality of metal structures.

A method of manufacturing a photodetector device is provided. The method includes providing a photodetector array comprising an array of photodetectors and a plurality of metal structures arranged between photodetectors of the array of photodetectors, where the plurality of metal structures are arranged in a first pattern; applying an antireflective coating to a surface of a transparent substrate, the antireflective coating being patterned according to a second pattern that matches the first pattern; aligning the transparent substrate over the photodetector array such that the first pattern is aligned with the second pattern; and coupling the transparent substrate to the photodetector array such that the antireflective coating covers the plurality of metal structures.

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Eindhoven, Netherlands

Marijn Van Os