Applied Materials Israel Limited

Electric Fuel (e.f.l.) Ltd.

Electric Fuel Limited

Mariano Abramson

Amir Moshe Sagiv

Shmuel Mangan

Yaron Shrim

Jonathan Goldstein

Robert B Dopp

Israel Avneri

Menachem Givon

Jimmy Vishnipolsky

Neal Naimer

Adam Baer

Yuri Belenky

Erez Admoni

Chaim Braude

Hadar Mazaki

Tzvi Rosenberg

Mark Slutski

A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.

Cleaning an object within a non-vacuumed environment

Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.

Method and system for use of binary spatial filters

Method and system for creation of binary spatial filters

A system that includes: (a) a mask manipulator, that is arranged to: receive an opaque EUV pod that encloses an EUV mask, extract, in a highly clean environment, the EUV mask from the outer pod and the inner pod of the EUV pod, and cover an upper face of the EUV mask with protective cover that is at least partially transparent to DUV radiation; (b) a scanner, arranged to scan the EUV mask, using DUV illumination while maintaining in the scanner an environment that has a cleanliness level that is below a tolerable EUV mask cleanliness level; and (c) a transport system arranged to transport the EUV mask and the protective cover between the scanner and the mask manipulator.

Inspection of EUV masks by a DUV mask inspection tool

A high capacity primary (single-use; non-rechargeable) battery pack for high current portable appliances such as cellular phones employs electrochemical cells that use ambient oxygen for one of the electrodes. The pack makes possible a simple low cost design by providing for oxygen supply in a completely passive yet compact configuration. Cells may be arranged inside a housing in a tightly packed arrangement by providing internal spaces that are sized to permit diffusion and, if possible, bulk air flow. The highest volumetric energy density is achievable by permitting bulk flow of air into the housing. It has been found that in practical use, in applications such as cellular telephones, that bulk air flow can play a significant role in gas exchange required for operation. A number of design criteria are developed for providing for a mix of molecular diffusion and bulk flow in the design of battery packs according to the invention. Most of these criteria relate to providing for gas exchange to portions of cells that are housed deep within the housing structure without requiring large amounts of physical space that would undermine the design goal of compactness. These criteria permit portions of cells to be positioned remotely from openings in the housing while still providing adequate oxygen delivery.

Battery pack design for metal-air battery cells

The invention provides a metal-air electrochemical cell, having a leak-proof, metal prismatic casing comprising a pair of interfacing interengaging rectangular tray-like casing components, a first substantially rectangular tray-like casing component having a first major surface and contiguous side walls for encompassing a cathode of the cell and a second inverted substantially tray-like casing component having a second major surface and contiguous depending side walls for encompassing an anode of the cell, the side walls of one of the casing components being of a height to facilitate the curling and crimping of an upper portion thereof over a peripheral edge area of the major surface of the other casing component to form a leak-proof, closed prismatic casing.

Prismatic metal-air cells

Growing community of inventors

Jerusalem, Israel

Mariano Abramson