Stichting Centrum Voor Micro-elektronics Twente

Maria D Skowronska-Ptasinska

David N Reinhoudt

Albert Van Den Berg

Peter D Van Der Wal

Ernst J Sudholter

The invention relates to a process for manufacturing a REFET and/or CHEMFET, comprising: (a) covalent bonding of a hydrophilic polymer layer to an isolator layer applied to a semiconductor material; (b) the absorption of water or a watery solution into said hydrophilic polymer layer; and (c) the binding of a hydrophobic polymer layer to the water holding hydrophilic polymer layer. It is advantageous that this water holding hydrophilic polymer layer also contains an electrolyte and/or a buffer. Preferably an ion to be measured with the CHEMFET also forms part of the electrolyte.

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Enschede, Netherlands

Maria D Skowronska-Ptasinska