Stmicroelectronics S.r.l.

Maria Carolina Turi

Flavio Francesco Villa

Paolo Ferrari

Enri Duqi

Matteo Perletti

Mikel Azpeitia Urquia

Roberto Campedelli

Stefano Losa

Lorenzo Tentori

Luca Lamagna

Silvia Nicoli

The present disclosure is directed to a method for manufacturing a micro-electro-mechanical device. The method includes the steps of forming, on a substrate, a first protection layer of crystallized aluminum oxide, impermeable to HF; forming, on the first protection layer, a sacrificial layer of silicon oxide removable with HF; forming, on the sacrificial layer, a second protection layer of crystallized aluminum oxide; exposing a sacrificial portion of the sacrificial layer; forming, on the sacrificial portion, a first membrane layer of a porous material, permeable to HF; forming a cavity by removing the sacrificial portion through the first membrane layer; and sealing pores of the first membrane layer by forming a second membrane layer on the first membrane layer.

Method for manufacturing a capacitive pressure sensor and capacitive pressure sensor

An electroacoustic MEMS transducer, having a substrate of semiconductor material; a through cavity in the substrate; a back plate carried by the substrate through a plate anchoring structure, the back plate having a surface facing the through cavity; a fixed electrode, extending over the surface of the back plate; a membrane of conductive material, having a central portion facing the fixed electrode and a peripheral portion fixed to the surface of the back plate through a membrane anchoring structure; and a chamber between the membrane and the back plate, peripherally delimited by the membrane anchoring structure.

Integrated electroacoustic MEMS transducer with improved sensitivity and manufacturing process thereof

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Milan, Italy

Maria Carolina Turi