Kabushiki Kaisha Toshiba

Mari Kusunoki

Shinji Miyazaki

Takuo Ohashi

Norihiko Kamiura

According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.

Vaporizing system

A pressure control device according to an embodiment includes a solenoid portion for regulating a gate opening of a valve through a first shaft portion connected to the valve, a micrometer for regulating the gate opening through the first shaft portion and a second shaft portion having an axial direction which is parallel with that of the first shaft portion when the second shaft portion is connected to the first shaft portion, and a switching portion. The switching portion switches to cause the solenoid portion to regulate the gate opening or to cause the micrometer to regulate the gate opening.

Growing community of inventors

Yokkaichi, Japan

Mari Kusunoki