Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Ifm Electronic Gmbh

Marcus Will

Stefan Xalter

Thomas Bischoff

Michael Muehlbeyer

Hermann Bieg

Uy-Liem Nguyen

Yim-Bun Patrick Kwan

Thomas Roehm

Yim-Bum Patrick Kwan

Hugo Kathan

The invention relates to an optical imaging device, in particular an objectivefor microlithography in the field of EUVL for producing semiconductor components, having a beam path, a plurality of optical elementsand a diaphragm devicewith an adjustable diaphragm opening shape. The diaphragm device has a diaphragm storewith a plurality of different diaphragm openingswith fixed shapes in each case, which can be introduced into the beam path

Diaphragm changing device

A housing for connection to an electrical line (), especially a bus line, with at least one first housing part () and one second housing part (), with at least one locking systemfor locking the first housing part () with the second housing part () in a common locking position, whereby a contact device () for making electrical contact with the line () is assigned to the first housing part () and whereby at least one line bed () for guiding the line () is formed in the second housing part (). The line bed () is made&#x2014;at least partially&#x2014;in a line bed carrier (), and the contact device () and the line bed carrier () can be turned such that the orientation of the line path can be adjusted with respect to the housing ().

Housing for connection to an electrical line

Growing community of inventors

Neu-Ulm, Germany

Marcus Will