Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Marcus Johannes Van Der Lans

Hamed Sadeghian Marnani

Paul Louis Maria Joseph Van Neer

Maarten Hubertus Van Es

Daniele Piras

Laurent Fillinger

Kodai Hatakeyama

Jozef Hubertus Gerardus Scholtes

Wilhelmus Cornelis Prinse

Sri Ram Shankar Rajadurai

Jozef Hubertus Scholtes

The present document relates to a heterodyne scanning probe microscopy (SPM) method for subsurface imaging, and includes: applying an acoustic input signal to a sample and sensing an acoustic output signal using a probe. The acoustic input signal comprises a plurality of signal components at unique frequencies, including a carrier frequency and at least two excitation frequencies. The carrier frequency and the excitation frequencies form a group of frequencies, which are distributed with an equal difference frequency between each two subsequent frequencies of the group. The difference frequency is below a sensitivity threshold frequency of the cantilever for enabling sensing of the acoustic output signal. The document also describes an SPM system.

Heterodyne scanning probe microscopy method and scanning probe microscopy system

Atomic force microscopy system comprising an atomic force microscopy device and a substrate carrier having a carrier surface carrying a substrate. The substrate has a substrate main surface and a substrate scanning surface opposite the substrate main surface. The atomic force microscopy device comprises a scan head including a probe. The probe comprises a cantilever and a probe tip arranged on the cantilever. The atomic force device further comprises an actuator cooperating with at least one of the scan head or the substrate carrier for moving the probe tip and the substrate carrier relative to each other in one or more directions parallel to the carrier surface for scanning of the substrate scanning surface with the probe tip. A signal application actuator applies, during said scanning, an acoustic input signal to the substrate, said acoustic input signal generating a first displacement field in a first displacement direction only. A tip position detector monitors motion of the probe tip relative to the scan head during said scanning for obtaining an output signal. The tip position detector is arranged for monitoring motion of the probe tip only in a direction orthogonal to the displacement direction.

Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system

In an aspect of the invention there is provided an integrated circuit initiator device that comprises a circuit substrate provided with an electrical insulating layer; an electrical conducting bridge circuit deposited on the insulating layer; said bridge circuit patterned as contact areas and a bridge structure connecting the contact areas, said bridge structure arranged for forming a plasma when the bridge structure is fused by a initiator circuit that contacts the contact areas; and a polymer layer that is spin-coated on the bridge structure, for forming a flyer that is propelled away from the substrate.

Integrated circuit initiator device

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Hillegom, Netherlands

Marcus Johannes Van Der Lans