Taiwan Semiconductor Manufacturing Comp. Ltd.

Imec

Globalfoundries Inc.

Nxp B.v.

Marcus Johannes Henricus Van Dal

Gerben Doornbos

Georgios Vellianitis

Mauricio Manfrini

Blandine Duriez

Timothy Vasen

Martin Christopher Holland

Matthias Passlack

Chung-Te Lin

Peter Ramvall

Sai-Hooi Yeong

Yu-Ming Lin

Yasutoshi Okuno

Chun-Chieh Lu

Georgios Vallianitis

Oreste Madia

Roel Daamen

Youri Victorovitch Ponomarev

Matthias Merz

David Paul Brunco

Aurelie Humbert

Stefan Jakschik

Jorge Adrian Kittl

Rita Vos

Liesbeth Witters

Anne Lauwers

Masaaki Niwa

A transistor may be provided by forming, in a forward order or in a reverse order, a gate electrode, a metal oxide liner, a gate dielectric, and an active layer over a substrate, and by forming a source electrode and a drain electrode on end portions of the active layer. The metal oxide liner comprises a thin semiconducting metal oxide material that functions as a hydrogen barrier material.

Access transistor including a metal oxide barrier layer and methods for forming the same

Structures and methods of forming the same are provided. A structure according to the present disclosure includes an interconnect structure, an aluminum oxide layer over the interconnect structure, and a transistor formed over the aluminum oxide layer. The transistor includes cuprous oxide.

Cuprous oxide devices and formation methods

A transistor, an integrated semiconductor device, and methods of making the same are provided. The transistor includes a dielectric layer having a plurality of dielectric protrusions, a channel layer conformally covering the protrusions of the dielectric layer to form a plurality of trenches between two adjacent dielectric protrusion, a gate layer disposed on the channel layer. The gate layerhas a plurality of gate protrusions fitted into the trenches. The transistor also includes active regions aside the gate layer. The active regions are electrically connected to the channel layer.

Protrusion field-effect transistor and methods of making the same

A field effect transistor may include an active layer containing an oxide compound material of at least two atomic elements including a first element of tin and a second element selected from Ge, Si, P, S, F, Ti, Cs, and Na and located over a substrate. The field effect transistor may further include a gate dielectric located on the active layer, a gate electrode located on the gate dielectric, and a source contact structure and a drain contact structure contacting a respective portion of the active layer. The oxide compound material may include at least germanium and tin. The oxide compound semiconductor material may be used as a p-type semiconductor material in BEOL structures.

Germanium tin oxide-containing semiconductor device and methods for forming the same

A semiconductor structure includes a storage element layer and a selector. The selector is electrically coupled to the storage element layer, and includes a first insulating layer, a second insulating layer, a third insulating layer, a first conductive layer and a second conductive layer. The first insulating layer, the second insulating layer and the third insulating layer are stacked up in sequence, wherein the second insulating layer is sandwiched in between the first insulating layer and the third insulating layer, and the first insulating layer and the third insulating layer include materials with higher band gap as compared with a material of the second insulating layer. The first conductive layer is connected to the first insulting layer, and the second conductive layer is connected to the third insulating layer.

Semiconductor structure and method of forming the same

A method includes forming a first dielectric layer over a substrate; forming a first transistor over a first side of the first dielectric layer; removing the substrate to expose a second side of the first dielectric layer opposite to the first side of the second dielectric layer; and forming a second transistor over the second side of the first dielectric layer. Forming the first transistor includes forming a semiconductor layer over the first side of the first dielectric layer; forming a first gate structure over the semiconductor layer; and forming source/drain epitaxy structures on opposite sides of the first gate structure. Forming the second transistor includes forming a semiconductive oxide layer over the second side of the first dielectric layer; forming a second gate structure over the semiconductive oxide layer; and forming source/drain contacts over the semiconductive oxide layer and on opposite sides of the second gate structure.

Method for forming semiconductor device with transistors on opposite sides of a dielectric layer

A transistor includes a first conductive type channel layer, a second conductive type channel layer, a gate structure, first source/drain regions and second source/drain regions. The first conductive type channel layer includes a plurality of first nanosheets. The second conductive type channel layer includes a plurality of second nanosheets stacked over the first nanosheets. The gate structure wraps around each of the first nanosheets and the second nanosheets. The first source/drain regions are disposed on opposite sides of the first nanosheets. The second source/drain regions are disposed on opposite sides of the second nanosheets and electrically isolated from the first source/drain regions.

Transistor and manufacturing method of the same

A transistor includes a first gate structure, a channel layer, and source/drain contacts. The first gate structure includes metallic nanosheets. Each of the metallic nanosheets includes a top surface, a bottom surface opposite to the top surface, and sidewalls connecting the top surface and the bottom surface. The channel layer surrounds the top surfaces, the bottom surfaces, and the sidewalls of the metallic nanosheets. The source/drain contacts are electrically connected to the channel layer. A portion of the channel layer is located between the source/drain contacts and the metallic nanosheets.

Transistor, integrated circuit, and manufacturing method of transistor

A method of forming a semiconductor device includes forming a contact metal layer, forming a channel structure on the contact metal layer, wherein the channel structure comprises a first source/drain region, a channel region and a second source/drain region stacked in that order, and forming a gate structure around the channel region, such that an upper surface of the gate structure is substantially coplanar with an upper surface of the channel structure.

Heterostructure oxide semiconductor vertical gate-all-around (VGAA) transistor and methods for making the same

Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes an interconnect structure and an electrode layer formed over the interconnect structure. The semiconductor structure also includes a gate dielectric layer formed over the electrode layer and an oxide semiconductor layer formed over the gate dielectric layer. The semiconductor structure also includes an indium-containing feature covering a surface of the oxide semiconductor layer and a source/drain contact formed over the indium-containing feature.

Semiconductor structure with thin film transistor

In a method of forming a gate-all-around field effect transistor (GAA FET), a fin structure is formed. The fin structure includes a plurality of stacked structures each comprising a dielectric layer, a CNT over the dielectric layer, a support layer over the CNT. A sacrificial gate structure is formed over the fin structure, an isolation insulating layer is formed, a source/drain opening is formed by patterning the isolation insulating layer, the support layer is removed from each of the plurality of stacked structures in the source/drain opening, and a source/drain contact layer is formed in the source/drain opening. The source/drain contact is formed such that the source/drain contact is in direct contact with only a part of the CNT and a part of the dielectric layer is disposed between the source/drain contact and the CNT.

Method of manufacturing a field effect transistor using carbon nanotubes and a field effect transistor

A transistor includes a vertical stack containing, in order from bottom to top or from top to bottom, a gate electrode, a gate dielectric, and an active layer and located over a substrate. The active layer includes an amorphous semiconductor material. A crystalline source region including a first portion of a crystalline semiconductor material overlies, and is electrically connected to, a first end portion of the active layer. A crystalline drain region including a second portion of the crystalline semiconductor material overlies, and is electrically connected to, a second end portion of the active layer.

Transistors including crystalline raised active regions and methods for forming the same

Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure includes a ferroelectric structure including a channel region and a source/drain region, a gate dielectric layer disposed over the channel region of the ferroelectric structure, a gate electrode disposed on the gate dielectric layer, and a source/drain contact disposed on the source/drain region of the ferroelectric structure. The ferroelectric structure includes gallium nitride, indium nitride, or indium gallium nitride. The ferroelectric structure is doped with a dopant.

Ferroelectric channel field effect transistor

A device includes a multi-layer stack, a channel layer, a ferroelectric layer and buffer layers. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers. The ferroelectric layer is disposed between the channel layer and each of the plurality of conductive layers and the plurality of dielectric layers. The buffer layers include a metal oxide, and one of the buffer layers is disposed between the ferroelectric layer and each of the plurality of dielectric layers.

Ferroelectric memory device and method of forming the same

A semiconductor device and a manufacturing method thereof are provided. The semiconductor device has a semiconductor layer and a gate structure located on the semiconductor layer. The semiconductor device has source and drain terminals disposed on the semiconductor layer, and a binary oxide layer located between the semiconductor layer and the source and drain terminals.

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Linden, Belgium

Marcus Johannes Henricus Van Dal