Government of the United States of America, As Represented by the Secretary of Commerce

Oxford Instruments Nanotechnology Tools Limited

Tescan S.r.o.

Marcus Jacka

Peter John Statham

Jabez J McClelland

Filip Lopour

Martin Zadrazil

Ian Richard Barkshire

James L Hanssen

Shannon B Hill

A charged particle analyzer () comprises a first non-imaging electrostatic lens () for receiving charged particles having divergent, trajectories and for converting the said trajectories into substantially parallel trajectories. At least one planar filter () is provided for receiving the charged particles having the substantially parallel trajectories and for filtering the charged particles in accordance with their respective energies. A second non-imaging electrostatic lens () receives the energy filtered charged particles and selectively modifies their trajectories as a function of their energies. A charged particle detector () then receives the charged particles in accordance with their selectively modified trajectories.

Charged particle analyser and method using electrostatic filter grids to filter charged particles

A system and method are disclosed for producing a source of ions, and particularly, a focused ion beam. The system and method use a magneto-optical trap (MOT) to produce a population of neutral atoms. A laser is then utilized to ionize atoms and produce a population of ions. An extraction element is then used to transfer the ions so that they can be used in a wide array of applications.

Magneto-optical trap ion source

The present invention deals with a secondary electron detector (), especially in a scanning electron microscope. The subject matter of the invention provides a secondary electrons detector () constituted by a sensor () located in a detector chamber (), to which a vacuum air pump () is connected to produce vacuum inside the detector chamber (), the detector chamber () being in its wall near to the active surface of the sensor () enclosed with a diaphragm featuring high resistance to the transmission of gas and low resistance to the transmission of the electrons. The electrically conductive grid () is produced either in the form of a copper screen or as a kapton membrane () with orifices () and it is equipped on both sides with conductive coating (). Outside the detector chamber (), the electrically conductive grid () is covered with an input screen (), which is usually of hemispherical shape and is connected to the low voltage source () of 80 to 150 V.

Secondary electron detector, especially in a scanning electron microscope

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York, United Kingdom

Marcus Jacka