Koninklijke Philips Corporation N.v.

Lumileds LLC

Philips Lighting Holding B.v.

Stichting Imec Nederland

Asml Netherlands B.v.

Signify Holding B.v.

Koninklijke Philips Electronics N.v.

Beijing Xiaomi Mobile Software Co., Ltd.

Lumileds Holding B.v.

Marcus Antonius Verschuuren

Jaime Gomez Rivas

Gabriel Sebastian Lozano Barbero

Dirk Kornelis Gerhardus De Boer

Abraham Rudolf Balkenende

Rifat Ata Mustafa Hikmet

Ties Van Bommel

Remco Van Brakel

Shunsuke Murai

Jan Frank Strömer

Said Rahimzadeh Kalaleh Rodriguez

Dagobert Michel De Leeuw

Eduard Johannes Meijer

Manuela Lunz

Mischa Megens

Hendrik Adrianus Van Sprang

Thomas Nicolaas Maria Bernards

George Immink

Anne Souren

Sander Frederik Wuister

Toni Lopez

Herbert Lifka

Hendrik Johannes Boudewijn Jagt

Jan De Graaf

Cristina Tanase

Johan Marra

Marius Iosif Boamfa

Cornelis Eustatius Timmering

Susanne Maaike Valster

Theo Arnold Kop

Marius Gabriel Ivan

Ronald Martin Wolf

Wilhelmina Maria Hardeman

Johannes Balthasar Maria Soetens

Hans Van Sprang

Merijn Wijnen

Ke Guo

Wilhelmus Johannes Everardus Evers

Vincenzo Giannini

Jaime Gómez Rivas

Rahimzadeh Kalaleh Rodriguez

Didier Mathijs Maria Justina Petit

Maurice Leonardus Johannes Janssen

Sunsuke Murai

Jan De Graff

Davy Louwers

Erik M H P Van Dijk

Olaf Janssen

Ruth W I De Boer

Gabriel Lozano

Manuel Forcales

Hubertas Wilhelmus Jacobus Jozef Van De Laar

Said Rahimzadeh Kalaeh Rodriguez

Jamie Gómez Rivas

Arun Narayanaswamy

Hendrik A Van Sprang

Olaf T A Janssen

Rifat A M Hikmet

Hubertus Wilhelmus Jacobus Jozef Van De Laar

Jaime GÓMEZ Rivas

Jens Udo Barendt

An imprinting apparatus comprises a first carrier for carrying a flexible stamp and a second carrier movable relative to the first carrier and configured to carry a substrate having a resist layer. The second carrier comprises a chuck and a set of chuck actuators for translating a portion of the chuck in a Z-axis direction. Each chuck actuator comprises an actuator output and a lever arrangement between the actuator output and a chuck drive member. The lever arrangement enables an increase in positioning accuracy and increased stiffness, compared to the direct control of position using the actuator output.

Imprinting apparatus

Disclosed are imprinting ink compositions for use in imprinting techniques such as SCIL. The imprinting ink compositions comprise TMO nanoparticles stabilized by selected polymerization inhibitors that allow for the formation of a stable imprinting ink composition in which polymerization of the TMO nanoparticles is effectively suppressed and from which high refractive index patterned layers can be formed. Imprinting methods using such imprinting ink compositions, optical devices including patterned layers formed from such imprinting ink compositions and lighting devices, optical sensors and photovoltaic devices including such optical elements are also disclosed.

Imprinting ink composition, imprinting method, optical element lighting device, optical sensor and photovoltaic device

A method of imprinting a substrate (), comprising affixing a flexible stamp () carrying an imprinting pattern () to a first carrier () comprising an array of apertures () which, by gas pressure, either pull the flexible stamp towards the first carrier or push it away; pushing it to a second carrier () carrying a substrate () with a resist layer (), leaving a gap () for creating a controllable contact area between the flexible stamp and the substrate and space () between the first carrier and the flexible stamp; progressively pushing areas of the flexible stamp into the resist layer to imprint it; developing the resist layer; and progressively releasing the flexible stamp by applying suction through successive apertures whilst controlling the inward flow of gas to the space () through the apertures that are not yet under suction in order to maintain the space () there above ambient but below a predetermined maximum pressure.

Pneumatic system, imprint apparatus and use thereof

Provided is a method of providing a patterned layer (). The method comprises providing (A,B) a substrate () having a surface () to which a compound is applied. The compound has at least one condensable group which is reactive with surface groups on the surface of the substrate by condensation reaction. The compound also has a basic group for accepting protons. A layer of a polycondensable imprinting composition () is applied () onto the layer of the compound. The imprinting composition layer is imprinted (A,B,C) with a patterned stamp. During the imprinting, polycondensation of the imprinting composition leads to forming of the patterned layer. Further provided is the patterned layer itself, as well as an optical element and an etch mask, each of which comprises the patterned layer.

Imprinted method and patterned layer

Disclosed is a stamp () for an imprint lithography process, the stamp comprising an elastomer stamp body including a polysiloxane bulk portion () and a patterned surface comprising a feature pattern () for imprinting an imprinting composition () wherein the elastomer stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomer stamp body. Also disclosed are methods of manufacturing such a stamp, and a method of forming a patterned layer on a substrate using such a stamp.

Imprint lithography stamp method of making and using the same

A method for forming a relief layer employing a stamp having a stamping surface including a template relief pattern. A solution comprising a siliconoxide compound is sandwiched between a substrate surface and the stamp surface and dried while sandwiched. After removal of the template relief pattern the relief layer obtained has a high inorganic mass content making it robust and directly usable for a number of applications such as semiconductor, optical or micromechanical.

Method for making relief layer

The present invention relates to fluorescence imaging. In order to enhance compatibility with multiple fluorescence channels for calibrating a fluorescence microscope, a calibration slide is provided that comprises a substrate and a pixel layout. The pixel layout comprises a plurality of spaced apart metal nanostructures arranged on a surface of the substrate. The metal nanostructures are arranged to produce plasmon resonances that allow absorbing light at an excitation wavelength to produce photo-luminescence and/or fluorescence light for generating a fluorescent image. The fluorescent image comprises a plurality of pixel intensity values that are provided for calibration of a fluorescence microscope.

Fluorescence calibration slide

Disclosed is a method of manufacturing a polyorganosiloxane-based stamp comprising providing a master including a transfer pattern surface; forming a first layer of a first curable composition onto the transfer pattern surface such that the first layer includes a relief pattern of said transfer pattern; partially curing the first layer; depositing a second layer of a second curable composition onto the partially cured first layer; co-curing the partially cured first layer and the second layer to form a cured first layer having a first Young's modulus, adhered to a cured second layer having a second Young's modulus smaller than the first Young's modulus; depositing a third layer of a third curable composition onto the second layer, and curing the third layer to form a cured third layer adhered to the cured second layer. Further disclosed is a polyorganosiloxane-based stamp obtainable from the method; use of the same for printing process; and an imprinting method using the same.

Polyorganosiloxane-based stamp manufacturing method, polyorganosiloxane-based stamp, use of the same for a printing process, and an imprinting method using the same

A method of manufacturing a patterned stamp () for patterning a contoured surface () is disclosed. The method comprises applying a layer () of a pliable material precursor over a master () carrying an inverse pattern () to form a desired pattern () in said layer; curing the pliable material precursor to form a pliable stamp layer () comprising said desired pattern; providing an intermediate stamp structure by adhering a porous pliable support layer () to the pliable stamp layer; releasing the intermediate stamp structure from the master; forcing the intermediate stamp structure onto the contoured surface with said pattern of features facing the contoured surface; forming the patterned stamp by filling the porous pliable support layer with a filler material to reduce the pliability of the support layer; and removing the patterned stamp from the contoured surface. A corresponding patterned stamp, imprinting method and imprinted article are also disclosed.

Patterned stamp manufacturing method, patterned stamp and imprinting method

A laminate comprising an abrasion resisting layer that is disposed on a surface of an optically transmissive substrate, wherein the layer comprises a pattern of spatially separated protrusions of an abrasion-resistant material extending away from the surface, and silica interposed between the protrusions. The abrasion-resistant material has a Knoop hardness measured according to ASTM E384 Knoop Hardness Standard that is greater than that of the silica.

Laminate comprising abrasion resisting layer, device comprising the same and method of manufacturing the same

Disclosed is a silane-based composition for forming an imprinting ink for imprint lithography applications in which the crosslinking of the silanes in the composition is suppressed by the inclusion of a compound of Formula 3: wherein Ris selected from the group consisting of C-Clinear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2. An ink may be formed by adding a PAG, photoinitiator or TAG to the composition such upon their activation, the crosslinking reaction is completed. An imprinting method using 10 such an ink is also disclosed. 

Composition, imprinting ink and imprinting method

An illumination device comprising a plurality of solid state light sources and a concentrating wave length converter arranged to inject light from said light sources through at least one entrance surface and to extract wave length converted light from at least one exit surface, comprising a structured layer provided on said exit surface, said structured layer having a structure period less than 5 micrometers, thereby enabling out-coupling through the exit surface by a combination of refraction and diffraction. In a situation where the angle of incidence on a surface is within a limited range, a combination of refraction and diffraction may provide a superior out-coupling from that surface.

Light source with diffractive outcoupling

A method of transferring a flexible layer to a substrate makes use of a partial bulge in the flexible layer, which does not make contact with the substrate. The partial bulge advances to the location of an alignment marker on the substrate. When alignment adjustments are needed, they are made with the partial bulge in place so that more reproducible positioning is possible when fully advancing the flexible layer against the substrate.

Transfer method and apparatus and computer program product

There is provided an illumination device () comprising: a periodic plasmonic antenna array (), comprising a plurality of individual antenna elements () arranged in an antenna array plane, the plasmonic antenna array being configured to support surface lattice resonances at a first wavelength, arising from diffractive coupling of localized surface plasmon resonances in the individual antenna elements; a photon emitter () configured to emit photons at the first wavelength, the photon emitter being arranged in close proximity of the plasmonic antenna array such that at least a portion of the emitted photons are emitted by a coupled system comprising said photon emitter and said plasmonic antenna array, wherein the plasmonic antenna array is configured to comprise plasmon resonance modes being out-of plane asymmetric, such that light emitted from the plasmonic antenna array has an anisotropic angle distribution.

Solid state illumination device having plasmonic antenna array for anisotropic emission

Growing community of inventors

Eindhoven, Netherlands

Marcus Antonius Verschuuren