Average Co-Inventor Count = 3.49
ph-index = 9
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asml Netherlands B.v. (106 from 4,861 patents)
2. Asml Holding N.v. (7 from 615 patents)
3. Carl Zeiss Smt Gmbh (1 from 1,402 patents)
107 patents:
1. 12436472 - Cooling hood for reticle
2. 12422759 - Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus
3. 12372888 - Patterning device conditioning system and method
4. 12332570 - Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris
5. 12287455 - Oxygen-loss resistant top coating for optical elements
6. 12276815 - EUV collector mirror
7. 12271008 - Transmissive diffusor
8. 12249480 - Fluid transfer system in a charged particle system
9. 12235592 - Object holder, electrostatic sheet and method for making an electrostatic sheet
10. 12174552 - Lithographic apparatus and electrostatic clamp designs
11. 12158706 - Lithographic apparatus and method with improved contaminant particle capture
12. 12117736 - Lithographic apparatus
13. 12072620 - Method of manufacturing a membrane assembly
14. 12066758 - Pellicle and pellicle assembly
15. 12001149 - Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus