Evatec Ag

Marco Rechsteiner

Hartmut Rohrmann

Heinz Felzer

Dominik Jaeger

Thomas Tschirky

A sputtering device to sputter a liquid target. The sputtering device including a trough to receive a liquid target material and a device to stir or agitate the liquid target material. The device configured to degas the liquid target material or/and to dissipate solid particles or islands on a surface of the target or/and to move such particles or islands from an active surface region to a passive surface region and/or vice-versa, whereby the passive surface region is at least 50% less exposed to sputtering as the active surface region.

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Werdenberg, Switzerland

Marco Rechsteiner