Stmicroelectronics S.r.l.

Marco Pugliese

Francesco Ferrara

A microfluidic valve includes: a first structural layer and a second structural layer; a microfluidic circuit having a first microfluidic conduit and a second microfluidic conduit, which are defined in a superficial portion of the first structural layer, are adjacent, and are separated by a wall; a membrane set between the first structural layer and the second structural layer and delimiting the microfluidic circuit on one side; and a recess containing a gaseous fluid in the second structural layer. The membrane is movable in response to an actuation stimulus between a closed position, in which the first and second microfluidic conduits are fluidly decoupled, and an open position, in which the membrane is at least in part retracted into the recess and the first and second microfluidic conduits are fluidly coupled by means of a fluidic passage defined between the wall and the membrane.

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Maglie, Italy

Marco Pugliese