Von Ardenne Anlagentechnik Gmbh

Marco Kenne

Michael Hentschel

Thomas Meyer

Hans-Christian Hecht

Hubertus Von Der Waydbrink

Reinhardt Bauer

Reinhard Jaeger

Daniel Stange

Damir Muchamedjarow

Hubertus Von Der Waybrink

Steffen Leβmann

Thomas Bock

A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.

Surface heating device for a substrate treatment device and substrate treatment device

A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.

Method and device for cleaning an optical position measurement system for substrates in a coating installation

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Dresden, Germany

Marco Kenne