Consorzio Delta Ti Research

Marco Giusti

Danilo Mascolo

Giuseppe Latessa

Antonietta Buosciolo

Giuseppe Gammariello

Italo Gison

Simone Di Marco

A thermoelectric generator of compact size, having a simple structure configured for increasing the conversion efficiency of thermal energy into electric energy, so as it is possible to transform into electric current also as amount of heat per unit surface greater than thin film prior art devices, has a base silicon wafer and a cover silicon wafer, wherein the cover silicon wafer is facing said base silicon wafer in such a way that the respective top contacts are in contact and the space between the cover silicon wafer and the base silicon wafer is a space in which vacuum is made or a gas is present, in particular air.

Thermoelectric generator

Dices of integrated Z-device structures on a substrate wafer of a 3D integrated thermo-electric generator (iTEG) may be stacked in a tri-dimensional heterogeneous integration mode, without or with interposer wafer dices, in coherent thermal coupling among them. Through silicon vias (TSVs) holes through the thickness of the semiconductor crystal of substrate of the dices of integrated Z-device structures in geometrical projection correspondence with valley bottom metal junction contacts, and through silicon vias (TSVs) holes through the thickness of the semiconductor crystal of interposer dices, in geometrical projection correspondence with the hill-top metal junction contacts of the coupled Z-device structures, have a copper or other good heat conductor filler, form low thermal resistance heat conduction paths through the stacked Z-device structures. Thermoelectrically generated current is gathered from every integrated Z-device of a multi-tier iTEG operating in an out-of-plane heat flux configuration.

3D integrated thermoelectric generator operating in an out-of-plane heat flux configuration with internal voids and heat conduction paths conditioning vias

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Rome, Italy

Marco Giusti