Koninklijke Philips Corporation N.V.

Marco De Wild

Ronald Dekker

Mareike K Klee

Peter Dirksen

Willem Franke Pasveer

Klaus Reimann

Olaf Wunnicke

Derk Reefman

Roger Peter Anna Delnoij

Engel Johannes Knibbe

Biju Kumar Sreedharan Nair

Ruediger Mauczok

Henri Marie Joseph Boots

Christina Adriana Renders

Remco Alphonsus Hendrikus Breen

Harry Van Esch

Chris Van Heesch

A transducer () is provided where a membrane () is formed over a front substrate (); and a piezoelectric layer () is formed over the membrane () at an active portion () and peripheral portions located adjacent the active portion (). A patterned conductive layer including first and second electrodes () is formed over the piezoelectric layer (). Further, a back substrate structure is provided having supports () located at the peripheral portions adjacent the active portion (). The height () of the supports () is greater than a combined height () of the patterned piezoelectric layer and the patterned conductive layer. Many transducers may be connected to form an array, where a controller may be provided for controlling the array, such as steering a beam of the array, and processing signals received by the array, for presence or motion detection and/or imaging, for example.

Thin film detector for presence detection

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Eindhoven, Netherlands

Marco De Wild