Solvay Fluor Gmbh

Marcello Riva

Solar cells are manufactured from P-type doped monocrystalline or polycrystalline silicon ingots by sawing wafers and applying an N-type doping. The wafers can be improved by etching them, especially in a plasma assisted process, with fluorine, carbonyl fluoride, SFor NF. Hereby, the surface is roughened so that the degree of light reflection is reduced, cracks caused from the sawing operation are prevented from proliferation, and glass-like phosphorus-containing oxide coatings caused by phosphorus doping are removed.

Process for the manufacture of solar cells

Elemental fluorine and carbonyl fluoride are suitable etchants for producing microelectromechanical devices ('MEMS'). They are preferably applied as mixtures with nitrogen and argon. If applied in Bosch-type process, CFis a highly suitable passivating gas.

Growing community of inventors

Hannover, Germany

Marcello Riva