Micron Technology Incorporated

Marcello Calabrese

Marcello Mariani

Antonino Rigano

Giorgio Servalli

Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, an integrated assembly includes a pillar having an upper source/drain, a middle source/drain, a lower source/drain, an upper channel between the upper source/drain and the middle source/drain, and a lower channel between the middle source/drain and the lower source/drain. The integrated assembly includes a gate pair that includes a first gate and a second gate. The first gate is positioned on a first side of the pillar at a first height, and the second gate is positioned on a second side of the pillar, that is opposite the first side, at a second height that is different from the first height. The integrated assembly includes a capacitor that is electrically coupled with the upper source/drain. Some implementations include methods of forming the various structures, integrated assemblies, and memory devices.

Memory device having a diagonally opposite gate pair per memory cell

A method used in forming an array of vertical transistors comprises forming laterally-spaced vertical projections that project upwardly from a substrate in a vertical cross-section. The vertical projections individually comprise an upper source/drain region, a lower source/drain region, and a channel region vertically there-between. First gate insulator material is formed along opposing sidewalls of the channel region in the vertical cross-section. One of (a) or (b) is formed over opposing sidewalls of the first gate insulator material in the vertical cross-section, where (a): conductive gate lines that are horizontally elongated through the vertical cross-section; and (b): sacrificial placeholder gate lines that are horizontally elongated through the vertical cross-section. The one of the (a) or the (b) laterally overlaps the upper source/drain region and the lower source/drain region. The first gate insulator material has a top that is below a top of the channel region and has a bottom that is above a bottom of the channel region. An upper void space is laterally between the one of the (a) or the (b) and both of the upper source/drain region and the channel region. A lower void space is laterally between the one of the (a) or the (b) and both of the lower source/drain region and the channel region. Second gate insulator material is formed in the upper and lower void spaces. Other embodiments, including structure independent of method, are disclosed.

Array of vertical transistors, an array of memory cells comprising an array of vertical transistors, and a method used in forming an array of vertical transistors

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Monza, Italy

Marcello Calabrese