Centre National De La Recherche Scientifique

Université Paris-Sud 11

Université Paris-Saclay

Université Paris—sud

Marcel Tence

Mathieu Kociak

Luiz Fernando Zagonel

Stefano Mazzucco

Henri Pinna

Pabitra Das

Jean-Denis Blazit

Luiz Galvao Tizei

Yves Auad

Stimulated or non-equilibrium energy-loss and energy-gain spectroscopy device

The invention relates to a cathodoluminescence detection system comprising: a collecting optic () collecting light radiation () from a sample illuminated by a beam of charged particles and reflecting said radiation () onto analysis means, said collecting optic () being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means () for adapting the light radiation, placed downstream of the collecting optic () and designed to adapt said light radiation () at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means () is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Cathodoluminescence detector including inner and outer tubes sealed from a vacuum chamber of an associated particle beam system

A cathodoluminescence detection system is provided, including

Adjustable cathodoluminescence detection system and microscope employing such a system

A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.

The inventive device for obtaining the electron energy loss image and/or spectra includes an image sensor, a control for at least two deflectors for alternately exposing at least two photosensitive parts of the image sensor, sensor reading means for generating the representative signal of an image captured by each photosensitive part of the image sensor, means for synchronizing the deflector and the reading means for successively controlling the exposition of the photosensitive part and the reading of the other photosensitive part for each photosensitive part and means for combining the two image parts in such a way that a spectrum is formed.

Device for obtaining the image and/or spectra of electron energy loss

Growing community of inventors

Issy les Moulineaux, France

Marcel Tence