Sensirion Ag

Sensirion Holding Ag

Marcel Plüss

Felix Mayer

Mark Hornung

Marc Von Waldkirch

A capacitive sensor includes a substrate and an electrode structure including at least a first electrode, a second electrode and a sensing layer arranged between the first electrode and the second electrode. The sensor further includes a measurement circuit configured to measure the capacitance of the electrode structure by applying, at a first measurement phase, a first pair of electrical potentials including a first electrical potential of the first electrode and a first electrical potential of the second electrode to the first electrode and the second electrode by applying, at a second measurement phase, a second pair of electrical potentials including a second electrical potential of the first electrode and a second electrical potential of the second electrode to the first electrode and the second electrode. The first electrical potential of the second electrode and the second electrical potential of the second electrode are different from each other.

Capacitive sensor

A thermal flow sensor is equipped with a self-test unit that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit can e.g. monitor the integrity of a membrane carrying the heater and temperature sensors, or it can monitor various operational parameters of the device, thereby increasing the safety of the device.

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Wädenswil, Switzerland

Marcel Plüss