Asml Netherlands B.v.

Marcel Peter Meijer

Johannes Petrus Martinus Bernardus Vermeulen

Johan Hendrik Klootwijk

Pieter-Jan Van Zwol

Paul Janssen

Antonius Franciscus Johannes De Groot

Mária Péter

David Ferdinand Vles

Arnoud Willem Notenboom

Maxim Aleksandrovich Nasalevich

Willem Joan Van Der Zande

Willem-Pieter Voorthuijzen

Adrianus Johannes Maria Giesbers

Wilhelmus Theodorus Anthonius Johannes Van Den Einden

Evgenia Kurganova

Aleksandar Nikolov Zdravkov

Hrishikesh Patel

Gerrit Van Den Bosch

Chaitanya Krishna Ande

Hendrikus Jan Wondergem

Peter Simon Antonius Knapen

Wouter Rogier Meijerink

Raymond Olsman

Johannes Joseph Janssen

Maria Peter

Alexandar Nikolov Zdravkov

A pellicle assembly includes a pellicle frame defining a surface onto which a pellicle is, or to be, attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. A pellicle assembly for a patterning device, the pellicle assembly includes one or more actuators for moving the pellicle assembly towards and way from the patterning device.

Pellicle and pellicle assembly

The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.

A pellicle assembly is disclosed that has a pellicle frame defining a surface onto which a pellicle is to be attached. The pellicle assembly includes one or more three-dimensional expansion structures that allow the pellicle to expand under stress. There is also disclosed a pellicle assembly for a patterning device, the pellicle assembly including one or more actuators for moving the pellicle assembly towards and way from the patterning device.

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Eindhoven, Netherlands

Marcel Peter Meijer