Asml Netherlands B.v.

Marcel Mathijs Theodore Dierichs

Sander Catharina Reinier Derks

Wilhelmus Theodorus Anthonius Johannes Van Den Einden

Alexander Nikolov Zdravkov

Johannes Fransiscus Maria Velthuis

Sumant Sukdew Ramanujan Oemrawsingh

Eric Willem Felix Casimiri

Wassim Zein Eddine

An apparatus comprising at least one sealing aperture () comprising a hollow part (), having an inner surface (), extending at an interface between different zones () of the apparatus; and a member () positioned in the hollow part configured to substantially transmit EUV radiation and to substantially filter non-EUV radiation at the interface; wherein the inner surface of the hollow part has a surface treatment configured to increase absorption of the non-EUV radiation that is transferred by the member to the hollow part.

Apparatus, a device and a device manufacturing method

Growing community of inventors

Veldhoven, Netherlands

Marcel Mathijs Theodore Dierichs