Meyer Burger (germany) Gmbh

Marcel Koenig

Jun Zhao

Hans-Peter Sperlich

Pierre Papet

Frank Wuensch

Detlef Sontag

Giuseppe Citarella

Gunnar Koehler

Heiko Mehlich

A backside emitter solar cell structure having a heterojunction, and a method and a device for producing the same. A backside intrinsic layer is first formed on the back side of the substrate, then a frontside intrinsic layer and a frontside doping layer are formed on the front side of the substrate, and finally a backside doping layer is formed on the back side of the substrate.

Backside emitter solar cell structure having a heterojunction and method and device for producing the same

A solar cell with a heterojunction is produced. A first amorphous nano- and/or microcrystalline semiconductor layer is formed on the front face of a crystalline semiconductor substrate to form front face emitter or a front face surface field layer. A second such layer is formed on the rear face of the substrate to form a rear face surface field layer or a rear face emitter. Electrically conductive, transparent front face and rear face electrode layers and a frontal metallic contact layer grid structure are formed. Surface selective frontal PECVD deposition forms an electrically non-conductive, transparent dielectric front face cover layer and with such a thickness to form a closed layer directly on deposition, without additional heat and/or chemical treatment, only on the areas surrounding the frontal contact layer grid structure but not on the frontal contact layer grid structure. Finally, a rear face metallization is formed.

Method for producing a solar cell, solar cell produced by this method and substrate carrier

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Chemnitz, Germany

Marcel Koenig