Intel Corporation

Marcel Arlan Wall

Suddhasattwa Nad

Rahul N Manepalli

Darko Grujicic

Srinivas V Pietambaram

Brandon C Marin

Jeremy D Ecton

Tarek A Ibrahim

Benjamin Duong

Rengarajan Shanmugam

Roy Dittler

Aleksandar Aleksov

Kristof Darmawikarta

Zhiguo Qian

Leonel R Arana

Sai Vadlamani

Thomas L Sounart

Dingying David Xu

Sri Chaitra Jyotsna Chavali

Kousik Ganesan

Bai Nie

Ravindra V Tanikella

Hongxia Feng

Sashi S Kandanur

Jieying Kong

Sandeep Gaan

Bohan Shan

Sarah Blythe

Adrian Bayraktaroglu

Michael Garelick

Jason Steill

Ke Liu

Helme A Castro De La Torre

Yiyang Zhou

Embodiments described herein may be related to apparatuses, processes, and techniques directed to embedding capacitors in through glass vias within a glass core of a substrate. In embodiments, the through glass vias may extend entirely from a first side of the glass core to a second side of the glass core opposite the first side. Layers of electrically conductive material and dielectric material may then be deposited within the through glass via to form a capacitor. the capacitor may then be electrically coupled with electrical routings on buildup layers on either side of the glass core. Other embodiments may be described and/or claimed.

Capacitors in through glass vias

An electronic substrate may be formed having at least one metal-to-dielectric adhesion promotion material layer therein. The electronic substrate may comprise a conductive metal trace, a dielectric material layer on the conductive metal trace, and the adhesion promotion material layer between the conductive metal trace and the dielectric material layer, wherein the adhesion promotion material layer comprises an organic adhesion material and a metal constituent dispersed within the organic adhesion material, wherein a metal within the metal constituent has a standard reduction potential greater than a standard reduction potential of the conductive metal trace.

Dielectric-to-metal adhesion promotion material

An electronic substrate may be fabricated by forming a base substrate and forming an inductor extending through the base substrate, wherein the inductor includes a magnetic material layer and a barrier layer, such that the barrier layer prevents the magnetic material layer from leaching into plating solutions during the fabrication of the electronic substrate. In one embodiment, the barrier material may comprise titanium. In another embodiment, the barrier layer may comprise a polymeric material. In still another embodiment, the barrier layer may comprise a nitride material layer. The inductor may further include a plating seed layer on the barrier layer and a conductive fill material abutting the plating seed layer.

Electronic substrates having embedded inductors

An integrated circuit (IC) package substrate, comprising a metallization level within a dielectric material. The metallization level comprises a plurality of conductive features, each having a top surface and a sidewall surface. The top surface of a first conductive feature of the plurality of conductive features has a first average surface roughness, and the sidewall surface of a second conductive feature of the plurality of conductive features has a second average surface roughness that is less than the first average surface roughness.

Selectively roughened copper architectures for low insertion loss conductive features

Embodiments disclosed herein include electronic packages and methods of forming such packages. In an embodiment, an electronic package comprises a package substrate, a first die over the package substrate, the first die having a first bump pitch, a second die over the package substrate, the second die having a second bump pitch that is greater than the first bump pitch, and a plurality of conductive traces over the package substrate, the plurality of conductive traces electrically coupling the first die to the second die. In an embodiment, a first end region of the plurality of conductive traces proximate to the first die has a first line space (L/S) dimension, and a second end region of the plurality of conductive traces proximate to the second die has a second L/S dimension. In an embodiment, the second L/S dimension is greater than the first L/S dimension.

Hybrid fine line spacing architecture for bump pitch scaling

Embodiments include package substrates and a method of forming the package substrates. A package substrate includes a self-assembled monolayer (SAM) layer over a first dielectric, where the SAM layer includes first end groups and second end groups. The second end groups may include a plurality of hydrophobic moieties. The package substrate also includes a conductive pad on the first dielectric, where the conductive pad has a bottom surface, a top surface, and a sidewall, and where the SAM layer surrounds and contacts a surface of the sidewall of the conductive pad. The hydrophobic moieties may include fluorinated moieties. The conductive pad includes a copper material, where the top surface of the conductive pad has a surface roughness that is approximately equal to a surface roughness of the as-plated copper material. The SAM layer may have a thickness that is approximately 0.1 nm to 20 nm.

Selective metal deposition by patterning direct electroless metal plating

Embodiments described herein are directed to interfacial layers and techniques of forming such interfacial layers. An interfacial layer having one or more light absorbing molecules is on a metal layer. The light absorbing molecule(s) may comprise a moiety exhibiting light absorbing properties. The interfacial layer can assist with improving adhesion of a resist layer to the metal layer and with improving use of one or more lithography techniques to fabricate interconnects and/or features using the resist and metal layers for a package substrate, a semiconductor package, or a PCB. For one embodiment, the interfacial layer includes, but is not limited to, an organic interfacial layer. Examples of organic interfacial layers include, but are not limited to, self-assembled monolayers (SAMs), constructs and/or variations of SAMs, organic adhesion promotor moieties, and non-adhesion promoter moieties.

Interfacial layer for high resolution lithography (HRL) and high speed input/output (IO or I/O) architectures

Embodiments of the present disclosure describe techniques for providing an apparatus with a substrate provided with plasma treatment. In some instances, the apparatus may include a substrate with a surface that comprises a metal layer to provide signal routing in the apparatus. The metal layer may be provided in response to a plasma treatment of the surface with a functional group containing a gas (e.g., nitrogen-based gas), to provide absorption of a transition metal catalyst into the surface, and subsequent electroless plating of the surface with a metal. The transition metal catalyst is to enhance electroless plating of the surface with the metal. Other embodiments may be described and/or claimed.

Apparatus with a substrate provided with plasma treatment

Techniques and mechanisms for bonding structures of a circuit device with a monolayer. In an embodiment, a patterned metallization layer or a first dielectric layer includes a first surface portion. The first surface portion is exposed to first molecules which each include a first head group and a first end group which is substantially non-reactive with the first head group. The first head groups attach to the first portion to form a first self-assembled monolayer, which is subsequently reacted with second molecules to form a second monolayer comprising moieties of the first molecules. In another embodiment, the first head group comprises a first moiety comprising a sulfur atom or a nitrogen atom, where the first end group comprises one of an acid moiety, an acid anhydride moiety, an aliphatic alcohol moiety, an aromatic alcohol moiety, or an unsaturated hydrocarbon moiety.

Circuit device with monolayer bonding between surface structures

Embodiments include a package substrate, a method of forming the package substrate, and a self-assembled monolayers (SAM) layer. The package substrate includes a SAM layer on portions of a conductive pad, where the SAM layer includes light-reflective moieties. The package substrate also includes a via on a surface portion of the conductive pad, and a dielectric on and around the via, the SAM layer, and the conductive pad, where the SAM layer surrounds and contacts a surface of the via. The SAM layer may be an interfacial organic layer. The light-reflective moieties may include a hemicyanine, a cyclic-hemicyanine, an oligothiophene, and/or a conjugated aromatic compound. The SAM layer may include a molecular structure having a first end group of a first monolayer, an intermediate group, a fifth end group of a second monolayer, and one or more of a first and second light-reflective moieties.

Package architecture with improved via drill process and method for forming such package

According to various embodiments of the present disclosure, a substrate for an integrated circuit includes a dielectric layer. The substrate further includes a conductive layer extending in an x or y direction. The conductive layer is at least partially embedded within the dielectric layer. The conductive layer includes a via having a first end and an opposite second end. The via has a first height in a z-direction and a constant cross-sectional shape between the first end and the second end. A trace is adjacent to the via and has a second height in the z-direction that is different than the first height.

Integrated circuit substrate and method of making

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Phoenix, AZ, United States of America

Marcel Arlan Wall