The Charles Stark Draper Laboratory, Inc.

Other

USA As Represented by Secretary of the Navy

Massachusetts Eye and Ear Infirmary

Massachusetts Institute of Technology

Northeastern University

Marc Steven Weinberg

Jonathan Jay Bernstein

Eugene H Cook

Paul A Ward

Amy Elizabeth Duwel

Anthony S Kourepenis

James Alan Bickford

Jeffrey T Borenstein

William David Sawyer

Anthony Petrovich

James S Pringle, Jr

David J Carter

Eric M Hildebrant

Francis J Kub

Brian T Cunningham

Karl D Hobart

Gregory A Kirkos

Rachael L Myers-Ward

Conrad Wall, Iii

Eugene A Imhoff

Ronald Steven McNabb, Jr

Richard D Elliott

Peter Miraglia

Mirela G Bancu

Thomas A Langdo

Mark Joseph Mescher

Matteo Rinaldi

Nicol E McGruer

Daniel Kenneth Freeman

Murali V Chaparala

Stanley R Shanfield

Burton Boxenhorn

Warner George Harrison

Stephanie Lynne Golmon

Mathew Varghese

Louis Kratchman

John Joseph LeBlanc

Raymond Carroll

James H Connelly

Paul Grieff

John J Le Blanc

Christopher M Lento

James R Cousens

Max Lindsay Turnquist

Lance C Niles

Kathleen H Sienko

Edward W O'Neil

Albert C Imhoff

William A Lenk

Edwin Carlen

Robert Samuel Langer

Paul Greiff

William M Johnson

John Gregory Aceti

Kaplesh Kumar

Ernest Soonho Kim

John R Williams

Michael J McKenna

Daniel Merfeld

Thomas A Campbell

Thomas F Marinis

Vishal Tandon

Cristian Cassella

William Joseph Trinkle, Jr

Joseph M Kinast

Steven D Rauch

Robert S DiMatteo

Michele S Sapuppo

Scott A Rasmussen

Malinda M Tupper

Robert A Larsen

Marcello Peppi

William Sewell

Steven T Cho

Robert Egri

Tommy W Lee

Joseph W Soucy

Christopher E Dubé

Byong-Ho Ahn

Peter G Sherman

Richard David Elliott, Iii

Erin Pararas

Ralph Hopkins

Bernard M Antkowiak

Ralph E Hopkins, Iii

Kenneth Fertig

Ralph Cohn

Steven Daley

A Thomas King

Thomas Francis Marinis, Jr

Michael Joseph Tomaino-Iannucci

Stephen L Finberg

Thayne R Henry

Nathan A St Michel

David S Nokes

John C Pinson

Howard L Watson

Andrew Ayoob

Zoltan S Spakovszky

John Shattler Fullford

Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.

Silicon MEMS gyroscopes with upper and lower sense plates

Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates

Aspects are generally directed to a compact and low-noise electric field detector, methods of operation, and methods of production thereof. In one example, an electric field detector includes a proof mass, a source of concentrated charge coupled to the proof mass, and a substrate having a substrate offset space defined therein, the proof mass being suspended above the substrate offset space. The electric field detector further includes a sense electrode disposed on the substrate within the substrate offset space and proximate the proof mass, the sense electrode being configured to measure a change in capacitance relative to the proof mass from movement of the proof mass in response to a received electric field at the source of concentrated charge. The electric field detector includes a control circuit coupled to the sense electrode and configured to determine a characteristic of the electric field based on the measured change in capacitance.

Miniature electric field detector

Electromechanical device structures are provided, as well as methods for forming them. The device structures incorporate at least a first and second substrate separated by an interface material layer, where the first substrate comprises an anchor material structure and at least one suspended material structure, optionally a spring material structure, and optionally an electrostatic sense electrode. The device structures may be formed by methods that include providing an interface material layer on one or both of the first and second substrates, bonding the interface materials to the opposing first or second substrate or to the other interface material layer, followed by forming the suspended material structure by etching.

Silicon carbide microelectromechanical structure, device, and method

The present disclosure provides compositions and methods for treating an auditory disease in a subject in need thereof comprising administering an effective amount of a gel-based precursor that includes an inner ear-specific therapeutic compound directly into the cochlea of the subject.

Method and process for quantitative evaluation of pharmacokinetics, therapeutic effects and safety of delivery of drug compounds to the inner ear for treatment of auditory disease

Aspects and embodiments are generally directed to magnetic field detector systems and methods. In one example, a magnetic field detector system includes a proof-mass including a magnetic dipole source, a plurality of supports, each individual support of the plurality supports being coupled to the proof-mass, a plurality of sensors, each individual sensor of the plurality of sensors positioned to measure a resonant frequency of a corresponding support of the plurality of supports, and a controller coupled to each individual sensor of the plurality of sensors, the controller configured to measure a characteristic of a magnetic field imparted on the proof-mass based on at least a first resonant frequency of the measured resonant frequencies.

Magnetic field detector system

Aspects and embodiments are generally directed to electric field detector systems and methods. In one example, an electric field detector system includes a proof-mass including a source of concentrated charge, a plurality of supports, each individual support of the plurality supports being coupled to the proof-mass, a plurality of sensors, each individual sensor of the plurality of sensors positioned to measure a resonant frequency of a corresponding support of the plurality of supports, and a controller coupled to each individual sensor of the plurality of sensors, the controller configured to measure a characteristic of an electric field imparted on the proof-mass based on at least a first resonant frequency of the measured resonant frequencies.

Electric field detector system

Provided is a Precision Voltage Reference (PVR). In one example, the PVR includes a resonator having an oscillation frequency, the resonator including a first proof-mass, a first forcer located adjacent a first side of the first proof-mass, and a second forcer located adjacent a second side of the first proof-mass. The PVR may include control circuitry configured to generate a reference voltage based on the oscillation frequency of the resonator, at least one converter configured to receive the reference voltage from the control circuitry, provide a first bias voltage to the first forcer based on the reference voltage, provide a second bias voltage to the second forcer based on the reference voltage, and periodically alter a polarity of the first and second bias voltages to drive the oscillation frequency to match a reference frequency, and an output configured to provide the reference voltage as a voltage reference signal.

Radiation-hard precision voltage reference

According to one aspect, embodiments herein provide a whole angle gyroscope comprising a central point, at least one mass arranged symmetrically about the central point, a plurality of transducers, each configured to perform at least one of driving and sensing motion of the at least one mass, and a processor coupled to the plurality of transducers, the processor configured to operate the plurality of transducers to drive the at least one mass in at least a first vibratory mode and a second vibratory mode, identify a rate dead zone of the whole angle gyroscope, and operate the plurality of transducers to apply a force to the at least one mass to reduce the identified rate dead zone of the whole angle gyroscope.

Calibration system and method for whole angle gyroscope

An environmental physical sensor is provided that includes a power input terminal, a sensor output terminal, and a resonant switch. The resonant switch includes a mechanical element that is responsive to an environmental stimulus and is coupled to an electrical switch. The electrical switch is operable between an open position and a closed position and electrically connects the power input terminal to the sensor output terminal when in the closed position. The mechanical element is configured to intermittently actuate the electrical switch into the closed position responsive to the environmental stimulus.

Zero power sensors

According to one aspect, embodiments herein provide a gyroscope comprising an axially symmetric structure, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of the axially symmetric structure, wherein the plurality of transducers is configured to drive the axially symmetric structure in at least a first vibratory mode and a second vibratory mode, and wherein the gyroscope is implemented on a hexagonal crystal-based substrate.

Whole angle MEMS gyroscope on hexagonal crystal substrate

According to one aspect, embodiments herein provide a gyroscope comprising a central anchor, a plurality of internal flexures, a plurality of masses, each mass coupled to the central anchor via at least one of the plurality of internal flexures and configured to translate in a plane of the gyroscope, and a plurality of mass-to-mass couplers, each mass-to-mass coupler coupled between two adjacent masses of the plurality of masses, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of a corresponding one of the plurality of masses, wherein the plurality of transducers is configured to drive the plurality of masses in at least a first vibratory mode and a second vibratory mode.

Whole angle MEMS gyroscope

Growing community of inventors

Needham, MA, United States of America

Marc Steven Weinberg