Nv Bekaert Sa

Sulzer Metaplas Gmbh

Europlasma Nv

Marc Sercu

Filip Legein

Eva Rogge

Peter Persoone

Dominique Neerinck

Samir Loulidi

Jean-Marie Jacquet

Wim Pappaert

Koen Vanhollebeke

The present invention concerns a method comprising the steps of: introducing a substrate comprising a surface to be coated in a low-pressure reaction chamber; exposing said surface to a plasma during a treatment period within said reaction chamber; ensuring a stable plasma ignition by applying a power input, characterized in that the power input is continuously strictly higher than zero Watt (W) during said treatment period and comprises at least a lower limit power and at least an upper limit power strictly larger than said lower limit power, thereby obtaining a substrate with a coated surface. The present invention further concerns an apparatus for treating a substrate with a low-pressure plasma process and a substrate treated as such.

Ways to generate plasma in continuous power mode for low pressure plasma processes

The invention relates to a coating comprising a number of layered structures, each such layered structure comprising&#x2014;a first layer comprising a diamond like nanocomposite layer, said first layer comprising carbon, hydrogen, oxygen and silicon; a second layer comprising a diamond like carbon layer. The number of layered structure is higher than 4 and is preferably between 10 and 100. The invention further relates to a method to deposit such a coating.

Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers

An improved non-sticking diamond-like nanocomposition includes networks of a-C:H and a-Si:O, wherein the H-concentration is between 85% and 125% of the C-concentration. The composition includes preferably 25 to 35 at % of C, 30 to 40 at % of H, 25 to 30 at % of Si, and 10 to 15 at % of O.

Method for making a non-sticking diamond-like nanocomposite

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Roeselare, Belgium

Marc Sercu