Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Marc Sansa Perna

Guillaume Jourdan

Sebastien Hentz

Sébastien Hentz

Théo Miani

Philippe Robert

Franck Badets

Thomas Alava

Thierry Verdot

Loïc Sibeud

Martial Defoort

Luca Leoncino

Houssein Elmi Dawale

A sensor for sensing the concentration of at least one biological species in blood includes a support, at least one waveguide, and an optomechanical resonator hanging to the support. The optomechanical resonator is optically coupled to the waveguide. The optomechanical resonator is configured to vibrate in a volume mode and includes at least one face extending in the plane of the sensor and is configured to receive molecules of the given species. The optical resonator includes a body comprising an optical active area and an optical insulation layer deposited at least in line with the optical active area so as to confine at least partially an electromagnetic wave in the body.

Optomechanical sensor for sensing species' concentration in a liquid medium

The present description concerns a clock signal generation device () comprising: a microelectromechanical resonant element (); and at least one nanoelectromechanical transduction element ().

Clock device

A force sensor including a support, a test body, two strain gauges, mechanical transmission means between the test body and the strain gauges so that a movement of the test body applies a strain onto the strain gauges in a first direction of the plane of the sensor, the transmission means being hinged relative to the support about a second direction in the plane of the sensor, the test body being accommodated within a first volume, the strain gauges being accommodated within a second volume, insulated by sealed insulation means. The sensor includes a sacrificial layer, a nanometric layer, a protective layer and a micrometric layer. The test body and at least one portion of the support are formed in the substrate, the sealed insulation means are partially formed by the nanometric layer and by the sacrificial layer, and the strain gauges are formed in the nanometric layer.

Highly sensitive resonant force sensor with a test body and at least one resonant element decoupled and each disposed in a suitable environment

A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, an element that measures a force including at least one resonator of resonant frequency ω, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωis such that ωa<ω<ω, the decoupling structure forming a mechanical low-pass filter between the proof body and the resonator.

Resonant microelectromechanical sensor with improved operation

The present description concerns a microelectromechanical sensor control method, including the steps of: exciting, with same first signal (FSL), a first resonant (L) and at least one second resonant element (R); and estimating a phase shift (&#x394;&#x3c6;) between the first signal and a second signal (FSR) which is an image of vibrations of the second resonant element.

Sensor control method

A detecting device configured to detect chemical or biological species in a given environment, includes a matrix-array sensor formed from opto-mechanical discs that are optically and mechanically resonant, able to bind to species of the environment, and arranged in rows and columns. The opto-mechanical discs of a given row are optically coupled to the same optical waveguide. Actuating electrodes are provided in order to ensure the mechanical resonance of the opto-mechanical discs. One p-n junction is associated with each opto-mechanical disc, the junctions of a given column being electrically connected to the same biasing electrode, so as to block the flow through the corresponding opto-mechanical disc of a parasitic electrical current. A control circuit is configured to forward bias, during a time window of read-out of a disc of interest, the p-n junction of a disc of interest so as to place, via a thermo-optical effect, its resonant wavelength at a working wavelength, such that an optical signal propagating through the optical waveguide associated with the disc of interest is amplitude modulated.

Device and method for detecting chemical or biological species

Particle detection device comprising a support, a platform for receiving particles, four beams suspending the platform from the support, such that the platform can be made to vibrate, means for making said platform vibrate at a resonance frequency, means for detecting the displacement of the platform in a direction of displacement. Each beam has a length l, a width L and a thickness e and the platform has a dimension in the direction of displacement of the platform and in which in a device with out of plane mode l&#x2265;10&#xd7;L and the dimension of each beam in the direction of displacement of the platform is at least 10 times smaller than the dimension of the platform in the direction of displacement.

Micro or nanomechanical particle detection device

A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f=fm+&#x394;f, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of &#x394;f.

Resonating measurement system using improved resolution

A method of characterizing frequency fluctuations of a resonator comprising the steps of: a) driving the resonator, in a linear regime, by simultaneously applying two periodical driving signals having respective frequencies, the frequencies being different from each other and from a resonant frequency of the resonator, but contained within a resonance linewidth thereof; b) performing simultaneous measurements of response signal of the resonator at the frequencies of the periodical driving signal; and c) computing a value representative of a correlation between the measurements, the value being indicative of frequency fluctuations of the resonator. An apparatus for implementing such a method is provided.

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Grenoble, France

Marc Sansa Perna