Cemecon Ag

Diaccon Gmbh

Marc Perle

Oliver Lemmer

Stefan Rosiwal

Christian Bareiss

Walter Reichert

Martin Rueffer

Martin RÜFFER

The invention relates to a device for coating a substrate using CVD, in particular for coating with diamond or silicon, wherein a neat conductor array composed of a plurality of elongated heat conductors () is provided in a housing (), said heat conductors extending between a first () and a second electrode (), wherein the heat conductors are held individually tensioned by a weight () attached to one end thereof. To increase the life of the neat conductors (), the invention proposes that the weight () or the heat conductor () be guided at the second electrode (), forming an electrical loop contact, in such a way that a vector of the weight force (G) produced by the weight () makes an angle (&#x3b1;) of no more than 45&#xb0; with a direction of the longitudinal extension of the heat conductor ().

Device and method for coating a substrate using CVD

The invention relates to a device for coating a substrate () using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors () is provided in a housing (), said heat conductors extending between a first () and a second electrode (), wherein the heat conductors () are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (), the invention proposes that the tensioning device comprises a tilt arm () having a tensioning weight (G), the heat conductor () being attached to the first end (E) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).

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Forchheim, Germany

Marc Perle