Applied Materials, Inc.

Other

Marc O'Donnell Schweitzer

Jennifer Watia Tiller

Brian T West

Bradley Owen Stimson

Joseph Frederick Sommers

Anthony Vesci

Karl Brueckner

Scott Dickerson

Stephen Abney

Embodiments for methods and apparatuses for solar heating are disclosed. One solar heating apparatus includes an insulating layer adjacent to an exterior of a structure. A heat transfer plate is adjacent to the insulating layer. A fluid conduit is adjacent to the heat transfer plate. The heat transfer plate is thermally connected to the fluid conduit for transferring heat from the heat transfer plate to fluid within the fluid conduit. A weather exposed layer is thermally connected to the heat transfer plate.

Solar heating method and apparatus

A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.

Flow-formed chamber component having a textured surface

In a method of cleaning a surface of a substrate processing chamber component to remove process deposits, the component surface is cooled to a temperature below about &#x2212;40&#xb0; C. to fracture the process deposits on the surface. The surface can be cooled by immersing the surface in a low temperature fluid, such as liquid nitrogen. In another version, the component surface is heated to fracture and delaminate the deposits, and optionally, subsequently rapidly cooled to form more fractures. The component surface cleaning can also be performed by bead blasting followed by a chemical cleaning step.

Cleaning of chamber components

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San Jose, CA, United States of America

Marc O'Donnell Schweitzer