Leland Stanford Junior University

Marc Negre

Zhenan Bao

Orestis Vardoulis

Alex L Chortos

Clementine M Boutry

Various embodiments are directed to sensor apparatuses and methods thereof. An example sensor apparatus includes a plurality of capacitors and sensor circuitry. The plurality of capacitors including a first substrate having a plurality of first electrodes, a second substrate having a second electrode, and a dielectric material, and with the plurality of first electrodes and the second electrode being separated by the dielectric material. The plurality of first electrodes are aligned with respect to the second electrode such that each of plurality of first electrodes form one of the plurality of capacitors with the second electrode. The sensor circuitry is coupled to the plurality of capacitors to differentiate between normal and shear forces applied to apparatus based on a pattern of impedance responses of each of the plurality of capacitors formed by the second electrode and the plurality of first electrodes.

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Stanford, CA, United States of America

Marc Negre