International Business Machines Corporation

Marc Mattaroccia

Michael F Lofaro

Raymond M Khoury

Jose M Ocasio

Leonard C Stevens, Jr

A semiconductor wafer is cleaned while a sponge or brush is pressed against the wafer with a constant forced applied utilizing a bias in a constant force pencil. The wafer is cleaned in the state wherein a collapsing portion of the constant force pencil with respect to the cleaning sponge cloth is set in such a way that the cleaning pressure, which is applied from the cleaning sponge to the wafer, can be constant and is adjustable. A method for cleaning wafers using a constant force pencil is also described.

Apparatus and method for wafer cleaning

A wafer cleaning apparatus includes a wafer holding mechanism and a wafer cleaning head; the mechanism contacts the outer edge of the wafer and has a surface substantially flush with the wafer surface. The wafer cleaning head includes a wafer cleaning element, which has a flat surface contacting the wafer surface when cleaning the wafer. The wafer cleaning element may be a brush, a sponge, or other suitable material. A portion of the wafer cleaning element overlies the above-mentioned surface of the wafer holding mechanism when cleaning the edge portion of the wafer. The wafer holding mechanism and wafer cleaning head are shaped to avoid mechanical interference therebetween when the edge portion of the wafer is cleaned. Accordingly, the entire wafer surface, including the area adjacent the edge, may be effectively cleaned.

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New Windsor, NY, United States of America

Marc Mattaroccia