Interuniversitair Microelektronica Centrum (imec)

Imec

Imec Vzw

Katholieke Universiteit Leuven, Ku Leuven R&d

Interuniversitair Micorelektronica Centrum (imec, Vzw)

Other

Katholieke Universiteit Leuven

Marc Marcel Heyns

Paul Mertens

Marc A Meuris

Mark Meuris

Anne S Verhulst

Rita Rooyackers

Bart Soree

Amirhasan Nourbakhsh

Hessel Sprey

Wim Dehaene

Cedric Huyghebaert

Geoffrey Pourtois

Stefan De Gendt

Dirk Maarten Knotter

Marc Schaekers

Frank Holsteyns

Stefan DeGendt

Quentin Smets

Daniele Leonelli

Karine Kenis

Michael McGeary

Martien Johanna Baeyens

Harald Okorn Schmidt

Tarun Kumar Agarwal

Peter Snee

A bilayer graphene tunnelling field effect transistor is provided comprising a bilayer graphene layer, and at least a top gate electrode and a bottom gate electrode, wherein the at least a top gate electrode and a bottom electrode are appropriately positioned relative to one another so that the following regions are electrically induced in the chemically undoped bilayer graphene layer upon appropriate biasing of the gate electrodes: a source region, a channel region, and a drain region.

Bilayer graphene tunneling field effect transistor

A spin transfer torque magnetic memory device is disclosed. In one aspect, the spin transfer torque magnetic memory device comprises a first layered structure stacked in a vertical direction and comprising alternating topological insulator layers and insulator layers. The memory device additionally includes a second layered structure stacked in the vertical direction and comprising alternating topological insulator layers and insulator layers. The memory device further includes a magnetic material interposing the first and second layered structures in a horizontal direction different from the vertical direction such that the magnetic material is in contact with a first side surface of the first layered structure and in contact with a first side surface of the second layered structure. Additionally, the magnetic material is configured to have a magnetization direction that can change in response to a current flowing through the magnetic material.

Spin transfer torque magnetic memory device

A semiconductor device comprising a graphene layer, a graphene oxide layer overlaying the graphene layer, and a high-k dielectric layer overlaying the graphene oxide layer is provided, as well as a method for producing the same. The method results in a graphene chemical functionalization that efficiently and uniformly seeds ALD growth, preserves the underlying graphene structure, and achieves desirable dielectric properties such as low leakage current and high capacitance.

Graphene based field effect transistor

A Tunnel Field Effect Transistor device (TFET) made of at least following layers: a highly doped drain layer, a highly doped source layer, a channel layer, a gate dielectric layer and a gate electrode layer, the gate dielectric layer extending along the source layer, and a highly doped pocket layer extending in between and along the gate dielectric layer and the source layer, characterized in that the pocket layer extends to between and along the source layer and the channel layer.

Tunnel field effect transistor device and method for making the device

A tunnel transistor is provided including a drain, a source and at least a first gate for controlling current between the drain and the source, wherein the first sides of respectively the first and the second gate dielectric material are positioned substantially along and substantially contact respectively the first and the second semiconductor part.

Tunnel transistor, logical gate including the transistor, static random-access memory using the logical gate and method for making such a tunnel transistor

A method and apparatus for removing a first liquid from a surface of a substrate is provided. A second liquid is supplied to at least part of a surface of a substrate having a rotary movement. The rotary movement has a center of rotation and an edge of rotation. The second liquid is directed from the center of rotation to the edge of rotation using a nozzle. A dry zone is created on the substrate as the position of the spray moves from the center of rotation to the edge of rotation. As a result, the first liquid and the second liquid are removed from the surface of the substrate.

Method and apparatus for removing a liquid from a surface of a substrate

A method and apparatus for dispensing a liquid on the surface of a localized zone of a substrate, for example for cleaning of etching purposes. Along with the liquid, a gaseous tensio-active substance is supplied, which is miscible with said liquid and when mixed with the liquid, reduces the surface tension of said liquid, thus containing the liquid in a local zone of the substrate surface.

Method and apparatus for localized liquid treatment of the surface of a substrate

A method and an apparatus for removing a liquid, i.e. a wet processing liquid, from at least one surface of at least one substrate is disclosed. A liquid is supplied on a surface of substrate. Simultaneously or thereafter the liquid or the substrate is locally heated to thereby reduce the surface tension of said liquid. By doing so, at least locally a sharply defined liquid-ambient boundary is created. According to the invention, the substrate is subjected to a rotary movement at a speed to guide said liquid-ambient boundary over the surface of the substrate thereby removing said liquid from said surface.

Method and apparatus for removing a liquid from a surface

The present invention is related to a method of removing particles and a liquid from a surface of a substrate using at least one rotating cleaning pad. The approach, according to the present invention, is a technique wherein a sharp liquid-vapor boundary is created on the surface of the substrate adjacent to the last wetted rotating cleaning pad of a plurality of rotating cleaning pads and particularly between this last wetted rotating cleaning pad and a first edge of the substrate.

Method of removing particles and a liquid from a surface of substrate

A method and an apparatus for removing a liquid, i.e a wet processing liquid, from a surface of at least one substrate is disclosed. A liquid is supplied on a surface of substrate. Simultaneously or thereafter besides the liquid also a gaseous substance can be supplied thereby creating at least locally a sharply defined liquid-vapor boundary. The gaseous substance and the liquid can be selected such that the gaseous substance is miscible with the liquid and when mixed with the liquid yields a mixture having a surface tension lower than that of the liquid. According to the invention, the substrate is subjected to a rotary movement at a speed to guide said liquid-vapor boundary over said substrate thereby removing said liquid from said substrate.

Method and apparatus for removing a liquid from a surface of a rotating substrate

A method for removing organic contaminants from a semiconductor surface whereby the semiconductor is held in a tank and the tank is filled with a fluid such as a liquid or a gas. Organic contaminants, such as photoresist, photoresidue, and dry etched residue, occur in process steps of semiconductor fabrication and at times, require removal. The organic contaminants are removed from the semiconductor surface by holding the semiconductor inside a tank. The method is practiced using gas phase processing. The tank is filled with a gas mixture, comprising water vapor and ozone.

Method for removing organic contaminants from a semiconductor surface

An apparatus for wet cleaning or etching of flat substrates comprising a tank with an inlet opening and outlet opening for said substrates. Said tank contains a cleaning liquid and is installed in a gaseous environment. At least one of the openings is a slice in a sidewall of the tank and is present below the liquid-surface. In the tank there may be a portion above the liquid filled with a gas with a pressure being lower than the pressure within said environment. The method comprises the step of transferring a substrate through the cleaning or etching liquid at a level underneath the surface of said liquid making use of said apparatus.

Apparatus and method for wet cleaning or etching a flat substrate

A semiconductor processing system for the production of semiconductor electronic devices is described, which includes a sequence of semiconductor processing steps carried out on a plurality of semiconductor processing machines, whereby the processing is carried out on discrete pieces of substrate which are smaller than conventional semiconductor wafers but may be made therefrom, or from larger diameter semiconducting wafers or from materials onto which semiconductor layers may be formed, and the discrete substrate pieces are selectably processable into the electronic devices either individually or as a plurality removably fixed to a support.

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Linden, Belgium

Marc Marcel Heyns