Robert Boschgmbh

Other

Marc-Henri Duvoisin

Dominique Marchal

Pawel Drabarek

Dominique Breider

Vincent Thominet

Roland Cochard

Raymond Pidoux

An interferometric measuring device for recording the shape, the roughness or the clearance distance of the surface of a measured object is provided, the measuring device having a modulating interferometer, to which is supplied short-coherent radiation by a radiation source, and which has a first beam splitter for splitting the radiation supplied into a first beam component guided via a first arm, and into a second beam component guided via a second arm. One beam is shifted with respect to the other beam, with the aid of a modulating device, in terms of the beam's light phase or light frequency, and passes through a delay line. The two beams are subsequently combined at an additional beam splitter of the modulating interferometer. A measuring probe that is spatially separated from the modulating interferometer is coupled to it or able to be coupled to it via a light-conducting fiber set-up, in which probe the combined beam components are split into a measuring beam guided to the surface by a probe-optical fiber unit having a slantwise exit surface on the object side and a reference beam. An accurate surface measurement is facilitated by the angle of inclination of the exit surface to the normal of the optical probe axis amounting to at least 46&#xb0;.

Interferometric measuring device

An interferometric measuring device for recording shape, roughness or separation distance of the surface of a measuring object, having a modulating interferometer, to which is supplied short coherent radiation by a radiation source, having a measuring probe that is spatially separated from the modulating interferometer and is coupled to it via a light-conducting fiber set-up, in which combined beam components are split in a common arm in a partially transmitting region into measuring and reference beams, and having receiver and evaluating devices for converting the supplied radiation into electrical signals and for evaluating the signals based on phase difference. A construction for reliable measurements even in tight hollow spaces provides that the partially transmitting region is formed by a slanting exit face of a probe fiber at an exit angle as to the optical probe axis and a likewise slanting entrance face, of a fiber section following on the object side, as to the optical probe axis at an entrance angle, a wedge-shaped gap being formed between the exit and entrance surfaces.

Interferometric measuring device utilizing a slanted probe filter

A method and a device for measuring at least one test surface and a reference test surface having an interference measuring probe which emits a first measuring beam which is aligned with respect to the reference test surface, are described. The measuring probe emits at least one second measuring beam, which is aligned with respect to at least the at least one test surface.

Interference measuring probe

An interferometric measuring device for detecting the shape, roughness or distance of surfaces is described. The interferometric measuring device has a modulation interferometer in which two partial beams are formed, one of which is shifted in its light phase or light frequency with respect to the other by a modulation device. The surface is measured with a measuring probe which is connected to the modulation interferometer and in which a measuring beam and a reference beam are formed, and an interference pattern which is analyzed in a connected receiving unit is formed from the measuring beam and the reference beam. A compact design that is easy to handle even in a manufacturing process is achieved by spatially separating the modulation interferometer which is designed as a basic unit from the measuring probe and by the fact that it can be connected to the measuring probe by an optical fiber arrangement, and the measuring arm and the reference arm are formed by solids conducting the measuring beam and the reference beam.

Modulation interferometer and fiberoptically divided measuring probe with light guided

A color television camera has a semiconductor image sensor composed of sensor elements of the CCD type arranged in a raster. The charges produced in the sensor elements within an integration interval are read out as video signals. The image on the semiconductor image sensor is shifted in the horizontal direction by a fraction of a raster unit of measurement from one integration interval to the next integration interval in a cyclical fashion. An increase of the resolution in the vertical direction will then result by reading out the video signals from the semiconductor image sensor. The horizontal image shift is produced in the optical path between the objective lens of the image sensor by means of filter disk mounted so as to be bistable. The filter disk can thereby be flipped through a predetermined angle and back between integration intervals of the image sensor.

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Préverenges, Switzerland

Marc-Henri Duvoisin