Centre National De La Recherche Scientifique

Vmicro

Universite Lille-1

Universitë De Bordeaux

Université De Lille

Université Lille 1 - Sciences Et Technologies

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Universite Paris Cité

Université Des Sciences Et Technologies De Lille 1

Université De Lille 1 - Sciences Et Technologies

Marc Faucher

Laurent Duraffourg

Benjamin Walter

Estelle Mairiaux-Mage

Vincent Bouchiat

Ivan Favero

Christophe Gaquiere

Lionel Buchaillot

Didier Theron

Guillaume Ducournau

Christophe Pierre Paul Gaquiere

Anne-Marie Bonnot

Christophe Morelle

Jean-Pierre Aime

Bernard Louis Amand Legrand

Gerard Couturier

Pierre Allain

Bernard Legrand

A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.

Micromechanical sensor with optical transduction

A device for measuring an acceleration includes a vibrating accelerometer including: a semiconductor substrate forming a fixed frame of the accelerometer; a test weight of the same material as the substrate and connected to the fixed frame, movable translationally along at least one sensing axis of the vibrating accelerometer; a guide of the same material as the substrate, connected to the fixed frame and test weight, guiding the test weight in the direction of the sensing axis; a layer made of a piezoelectric semiconductor deposited on the substrate, the layer being tensilely prestrained; a resonator in the layer connected to the fixed frame, the resonator subjected to tension or compression in the direction of the sensing axis; and at least one transducer connected to the resonator, able to actuate the resonator, to keep the resonator oscillating and/or to detect an electrical signal generated by the resonator.

Prestrained vibrating accelerometer

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

Compact probe for atomic-force microscopy and atomic-force microscope including such a probe

The invention relates to a modulation device created on a substrate (), comprising at least one nanodiode in the form of a T fitted into a U, the channel () of said nanodiode being the leg of the T that is inserted into the U. The device is characterized in that it comprises at least one electrically conductive line () that passes over at least part of said channel ().

Modulation device comprising a nanodiode

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

Miniaturized and compact probe for atomic force microscopy

A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

Microelectromechanical device and system with low-impedance resistive transducer

The invention relates to a method of growing carbon nanotubes () on a substrate () using a hot-wire-assisted chemical vapor deposition method. The inventive method consists in first depositing a bilayer of titanium () and cobalt () on the substrate such that: the thickness of the titanium layer is between 0.5 and 5 nm, the thickness of the cobalt layer is between 0.25 and 10 nm, and the thickness of the cobalt layer is between half and double that of the titanium layer.

Carbon nanotube growth method

A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P) projecting from said resonator, the probe being characterized in that: it also includes means (EL) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P, P') projects from said resonator substantially in correspondence with an antinode point (PV) of said volume mode of oscillation. An atomic force microscope including such a probe (SM&#x2032;). A method of atomic force microscopy including the use of such a probe.

Atomic force microscopy probe

Growing community of inventors

Lesquin, France

Marc Faucher