Commissariat a L'energie Atomique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Other

Marc Delaunay

Anne Ghis

Marie-No&euml;lle Semeria

Bruno Daudin

Bernard Jacquot

Marie-Noelle Semeria

Francois Zadworny

Rene Gualandris

Claude Jacquot

Paul Ludwig

Jean-Claude Rocco

Richard Geller

Francois Bourg

Pierre Sermet

Jean-Marc Mathonnet

Anne Senillou

Cyril Vannufel

Semeria Marie-Noélle

A process for producing a structure () comprising a membrane () of a first material, in particular indium-tin oxide, in contact with receiving ends () of a plurality of nanowires (), the process comprising

Nanowire structure and method for producing such a structure

A device for producing an amorphous carbon layer by electron cyclotron resonance plasma, the device including a plasma chamber; a gas supply; a magnetic mirror; a waveguide extending along a reference axis; a system for injecting microwave power; a magnetic field generator for generating a magnetic field in the plasma chamber, the magnetic field generator being configured to create a beam of magnetic field lines along which plasma is diffused; a target made from carbon; a substrate holder, wherein the target is arranged at a distance from the reference axis of between R/2 and R, and wherein the device further includes a screen arranged between the waveguide and the substrate holder.

Device for producing an amorphous carbon layer by electron cyclotron resonance plasma

A capacitive vibrating-membrane ultrasonic transducer includes a carrier with a cavity, a vibrating membrane fastened to the carrier and covering the cavity, and a conductive element separated from the membrane by the cavity. The vibrating membrane has a resonant frequency in membrane mode fm and a resonant frequency in plate mode fp according to the relationship fm&#x3e;fp. An exciting circuit has terminals connected to the vibrating membrane and the conductive element, and is configured to apply, across its terminals, an electrical signal the maximum frequency fo according to the relationship fm&#x3e;1.5*fo; or a measuring circuit is connected to the vibrating membrane and the conductive element and configured to measure capacitance variations up to a frequency fo.

Wide-passband capacitive vibrating-membrane ultrasonic transducer

A microelectromechanical system includes a membrane of amorphous carbon having a thickness between 1 nm and 50 nm, and for example between 3 nm and 20 nm.

Membrane of amorphous carbon and MEMS including such a membrane

The invention relates to a process for synthesizing nanorods of a carbide of one metal Mon a substrate, which comprises: The invention also relates to a process for growing nanorods of a carbide of one metal Mon a substrate from nanocrystals of this metal, to the substrates thus obtained and to their applications: fabrication of Microsystems provided with chemical or biological functionalities, in particular the fabrication of biosensors; electron emission sources, for example for flat television or computer screens; etc.

Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof

Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes (SWNTs) on a catalyst-free substrate, by injection of microwave power into a deposition chamber comprising a magnetic confinement structure with a magnetic mirror, and at least one electron cyclotron resonance area inside or at the border of the deposition chamber and facing the substrate, whereby dissociation and/or ionization of a gas containing carbon is caused, at a pressure of less than 10mbars, in the magnetic mirror at the center of the deposition chamber, producing species that will be deposited on said heated substrate. The substrate surface includes raised and/or lowered reliefs. The invention concerns the SWNTs thus obtained.

Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained

A process makes at least one nanotube between two electrically conducting elements located on a substrate, using, inside a deposition chamber, a microwave power, a magnetic field, and at least one electronic cyclotron resonance zone faciliting ionization and/or dissociation of a gas containing carbon injected into the deposition chamber at a low pressure inside the deposition chamber, causing ionization and/or dissociation of this gas in each electronic cyclotron resonance zone. The ions and electrons produced are located along the field lines of the magnetic field set up in the deposition chamber. The process also includes a screening operation of the various species produced in each electronic cyclotron resonance zone to enable exclusive access of CxHynon condensable free radicals produced to access a deposition zone adjacent to at least one part of the substrate including the two electrically conducting elements to make the nanotube.

Process for making at least one nanotube between two electrically conducting elements and device for implementing such a process

Process and device for depositing, by electron cyclotron resonance plasma, a web of carbon nanofibres or nanotubes, on a substrate without a catalyst, by injection of a microwave power into a deposition chamber including a magnetic structure with a highly unbalanced magnetic mirror and at least one electron cyclotron resonance zone within the interior of the deposition chamber itself and opposite the substrate. Under a pressure of less than 10 mbar, ionization and/or dissociation of a gas containing carbon is induced in the magnetic mirror in the center of the deposition chamber, thus producing species that deposit on the substrate, which is heated. A resulting film, which may be on a substrate, can be formed from a web or a network of interconnected carbon nanofibres or nanotubes, like a spider's web, the film being exempt of a catalyst and a structure of several layers-a multi-layer structure-including at least two layers of a web of carbon nanofibres or nanotubes, as well as filters, electron accelerating or decelerating nanogrids and flat screens including such films or structures.

Method and device for electronic cyclotronic resonance plasma deposit of carbon nanofibre layers in fabric form and resulting fabric layers

Process for the deposition by electron cyclotron resonance plasma of electron-emitting carbon films under the effect of an electric field applied

A linear microwave plasma source comprises a leaktight chamber (,) under negative pressure and a microwave injection guide (,) that ends in a 90&deg; elbow (,) opening perpendicularly into the chamber, a leaktight microwave window,) being placed between the microwave injection guide (,) and the 90&deg; elbow (,) such that they cause ionization of the gas in a zone (,) of electron cyclotron resonance located a few centimeters inside the elbow (,) that is under negative pressure. First and second permanent magnets (,) are disposed on either side of said window (,), said magnets (,) being installed with alternating polarity. A sputtering target (,) is located inside the plasma stream and electrically insulated from the chamber and charged with a negative polarity, and means (,) for injecting gas for controlling the ionic species of the plasma stream are provided.

Permanent magnet linear microwave plasma source

A device for optimizing a source of ions with electronic cyclotronic resonance (ECR) is provided. The present invention comprises a conventional ECR source to which an apparatus is added for moving the resonance point (C) which appears in the dielectric pipe when the source is in operation. The controlled adjustment of the position of the resonance point (C) ensures an optimal positioning of points A and B of the equimagnetic surface, points (A) and (B) being dependent on point (C). The resonance displacement apparatus comprises, in one embodiment, a magnetic screw threaded onto its periphery so as to form a screw/nut system with the armouring of the ECR source. Particular utility is found in the area of particle accelerator equipment for use in scientific and medical applications, although other utilities are contemplated.

Source of ions with electronic cyclotronic resonance

An electron cyclotron resonance ion source in which a plasma is confined in a magnetic configuration having a first group of coils located in the plane defined by the tight window of an ultra-high frequency injector and surrounding the latter, supplying the magnetic field creating and confining a plasma as well as a second group of coils supplied in counter-field compared with the first group and surrounding an ion extraction system. Ion extraction takes place in a magnetic field well below that corresponding to the cyclotron resonance. This ion source has numerous applications in the field of thin layer sputtering, microetching, ion implantation, accelerators, etc.

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Meylan, France

Marc Delaunay