Beijing Sevenstar Flow Co., Ltd.

Bejing Sevenstar Electronics Co., Ltd.

Maolin Wang

Changhua Mou

Di Zhao

Qianyi Su

Nelson Urdaneta

An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, a sensor unit, an electromagnetic valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts a flow rate setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a control module and a calculation module. The valve control circuit opens the electromagnetic valve according to the first control signal only, and further regulates an openness of the electromagnetic valve according to the first control signal and the second control signal. It is concluded that response time of the mass flow control apparatus of the present invention is shorten, and control quality is improved.

Method and apparatus of mass flow controlling for use in integrated gas delivery system

The present invention provides a new type flow control system comprising a valve control circuit and a power source circuit. Two terminals of the primary coil of the power source circuit transformer are respectively connected with two power source circuit FETs, the secondary coil of the power source circuit transformer is connected to the voltage output terminal of the power source circuit through a power source rectification circuit. The gates of the power source circuit FETs are connected with a switching regulator. The AC input terminal of the valve control circuit is connected with a valve control circuit transformer. The primary coil of the valve control circuit transformer is connected with a valve control circuit FET, the secondary coil of the transformer is connected to a mechanical valve through a valve control rectification circuit. A microcontroller outputs PWM signals to the gate of the valve control circuit FET.

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Beijing, China

Maolin Wang