Applied Materials, Inc.

Manush Birang

Leonid Poslavsky

Nils Johansson

Paul E Luscher

Terry Lee Doyle

Gregory L Kolte

A substrate processing system having a bi-directional interface and concomitant communication protocol to allow a controller to communicate with an external endpoint system is disclosed. More specifically, the substrate processing system comprises a controller and an endpoint detection system that are coupled together via a RS-232 interface. A SECS compliant communication protocol is employed to effect communication between the controller and endpoint detection system to increase wafer processing information exchange and data exchange.

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Los Gatos, CA, United States of America

Manush Birang