Comet Ag

Trumpf Huettinger Gmbh + Co. Kg

Comet Ag Plasma Control Technologies

Trumpf Huttinger Gmbh + Co. Kg

Manuel Vor Dem Brocke

Daniel Gruner

Roland Schlierf

André Grede

Anton Labanc

Christian Bock

Andre Grede

Alberto Pena Vidal

Nikolai Schwerg

Markus Winterhalter

Christoph Hofstetter

Thomas Fink

Sebastian Fecker

Armin Bannwarth

A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; determining a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters based on the comparison of the target RF signal and the at least one distorted RF signal being synchronized; and generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced.

Method for generating an RF signal, controller, RF generator and plasma apparatus

A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.

Radio frequency generator

A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RF) each having a respective output frequency (f), phase (Φ), and amplitude (A), including The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RF).

Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

A device for synchronizing a periodic high frequency power signal () and an external reference signal (). The device comprises a phase control circuit () and a digital oscillator circuit (). The digital oscillator circuit () is connected to the phase control circuit (). The digital oscillator circuit () comprises means for generating the periodic high frequency power signal () dependent on the control signal from the phase control circuit. The phase control circuit () is configured to determine a phase difference of the periodic high frequency power signal () and the external reference signal ().

Device and method for synchronizing a high frequency power signal and an external reference signal

The invention relates to a device for synchronizing a periodic high frequency power signal () and an external reference signal (). The device comprises a phase control circuit () and a digital oscillator circuit (). The digital oscillator circuit () is connected to the phase control circuit (). The digital oscillator circuit () comprises means for generating the periodic high frequency power signal () dependent on the control signal from the phase control circuit. The phase control circuit () is configured to determine a phase difference of the periodic high frequency power signal () and the external reference signal ().

The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.

Device and method for filtering multiple pulse signals

The invention relates to a device for generating a plurality of clock signals or high-frequency signals. The devices includes a reference signal generator, which is connected to an oscillator and generates at its output a reference signal with a reference frequency fx. The device also includes at least one signal processor, for example, a DDS, which is connected to the reference frequency generator via a first signal line and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency less than fx.

Generating a plurality of clock signals or high-frequency signals

A power supply system comprises an amplifier stage that includes at least one transistor, for example an LDMOS transistor. The transistor is connected to a supply voltage via a power connection, and is controlled by a control voltage at the control connection of the transistor. In some implementations, a first controller is provided for adjusting the control voltage of the transistor, and a second controller is provided for adjusting the supply voltage. In some implementations, one of the controllers is designed to feed a state signal to the other controller, and the other controller is designed to evaluate the state signal.

System and method for adjusting output of amplifiers

Various methods and systems control the power of a process power supply by a control circuit with a controller and several control channels, wherein each control channel comprises an actual value and a target value of a control variable. The systems and methods specify target values of the control variables, determine the actual values of the control variables, determine a selected control channel with the assistance of a selection variable dependent upon the actual value, determine a selected control difference from the target value and the actual value of the selected control channel, and control the control loop with the selected control difference of the selected control channel.

Growing community of inventors

Freiburg, Germany

Manuel Vor Dem Brocke