Robert Boschgmbh

Manuel Dietrich

Johannes Classen

Thorsten Balslink

Timm Hoehr

Frank Reuss

A manufacturing method for a micromechanical component. The method includes: providing an ASIC component including first front and rear sides, a strip conductor unit being provided at the first front side; providing a MEMS component including second front and rear sides, a micromechanical functional element situated in a cavity at the second front side; bonding the first front side onto the second front side; back-thinning the first rear side; forming vias starting from the back-thinned first rear side and from a redistribution unit on the first rear side, the vias electrically connecting the strip conductor unit to the redistribution unit; forming electrical contact elements on the redistribution unit; and back-thinning the second rear side. The back-thinning of the first and second rear side taking place so that a thickness of the stack made up of ASIC component and MEMS component is less than 300 micrometers.

Manufacturing method for a micromechanical component, a corresponding micromechanical component and a corresponding configuration

A method is described for determining angle errors when measuring slewing angles of a pivoted light-deflecting device, including the following steps: emitting a first light beam and a second light beam, which enclose a light beam angle, onto the light-deflecting device; receiving the first light beam and second light beam deflected by the light-deflecting device and reflected by an object; calculating a first propagation path of the first light beam and a second propagation path of the second light beam; pivoting the light-deflecting device from an initial position to a final position, respective slewing angles of the light-deflecting device being measured in the process and a dependency of the first propagation path on the measured slewing angles being determined; and calculating an angle error for a measured slewing angle to be corrected from the set of measured slewing angles by using the light beam angle, the second propagation path and the dependency of the first propagation path on the measured slewing angle.

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Reutlingen, Germany

Manuel Dietrich