Fas Medic S.a.

Manuel Diaz

Davide Azzoni

Joel Di Dio

Vincent Tanari

Teddy Blampey

Joël Di Dio

There is provided a fluid sensing apparatus comprising a fluid flow channel, at least one fluid conduit in fluid communication with the fluid flow channel, and a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing. The fluid sensing apparatus also includes a pressure compensation chamber in which the casing of the fluid sensor is enclosed. The apparatus further includes at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel. Also provided is a mass flow controller including such a fluid sensing apparatus.

Pressure compensation chamber

Valve block

A fluid sensing apparatus is provided having a fluid flow channel having a flow restriction. A fluid sensor is in fluid communication with first and second fluid ports, and a laminar flow element. The laminar flow element includes a flow stabilisation rod which defines a fluid sensing portion of the fluid flow channel. The flow restriction comprises a reduction in the hydraulic diameter of the fluid sensing portion of the fluid flow channel which is caused by a decrease in diameter of the fluid flow channel, or by an increase in the diameter of the flow stabilisation rod, or by both a decrease in diameter of the fluid flow channel and an increase in the diameter of the flow stabilisation rod. Also provided is a mass flow controller including such a fluid sensing apparatus.

Flow laminator

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Le Lignon, Switzerland

Manuel Diaz