Carl Zeiss Smt Gmbh

Carl Zeiss Ag

Manuel Decker

Lars Stoppe

Markus Koch

Klaus Gwosch

Lukas Fischer

Daniel Werdehausen

To determine an imaging quality of an optical system when illuminated by illumination light within an entrance pupil or exit pupil, a test structure is initially arranged in an object plane of the optical system and an illumination angle distribution for illuminating the test structure with the illumination light is specified. The test structure is illuminated at different distance positions relative to the object plane. An intensity of the illumination light is measured in an image plane of the optical system, the illumination light having been guided by the optical system when imaging the test structure at each distance position. An aerial image measured in this way is compared with a simulated aerial image and fit parameters of a function set for describing the simulated aerial image are adapted and a wavefront of the optical system is determined on the basis of the result of a minimized difference.

Method for determining an imaging quality of an optical system when illuminated by illumination light within an entrance pupil to be measured

The invention relates to a diffractive optical element with a spatial variation in the refractive index, wherein a sequence of adjacent sections, which form a diffractive structure, is formed by the spatial variation in the refractive index, within which sections the refractive index varies in each case. Over a spectral range extending over at least 300 nm, the diffractive structure has a diffraction efficiency of at least 0.95, averaged over the entire spectral range. The value of the diffraction efficiency of at least 0.95, averaged over the entire spectral range, is realized by a single single-layer diffractive structure with an optimized combination of at least two refractive indices and at least two Abbe numbers within each section of the sequence of adjacent sections. The refractive index variation can be achieved by means of doping, material mixing, or structuring into sub-wavelength ranges.

Diffractive optical element, method for designing an efficiency-achromatized diffractive structure, and method for producing an efficiency-achromatized diffractive element

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Jena, Germany

Manuel Decker