Applied Materials, Inc.

Manjunatha Vishwanatha Adagoor

Kyle Moran Hanson

Karthikeyan Balaraman

Karthick Vasu

Shailesh Chouriya

Electroplating system seals may include an annular busbar characterized by an inner annular radius and an outer annular radius. The annular busbar may include a plurality of contact extensions. The seals may include an external seal member characterized by an inner annular radius and an outer annular radius. The external seal member may be vertically aligned with and extend inward of the contact extensions at the inner annular radius of the external seal member. The external seal member may include an interior surface at least partially facing the contact extensions. The seals may also include an internal seal member extending a first distance along the interior surface of the external seal member from the inner annular radius. The internal seal member may include a deformable material configured to support a substrate between the internal seal member and the plurality of contact extensions.

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Bengaluru, India

Manjunatha Vishwanatha Adagoor