Kla Tencor Corporation

Manikandan Mariyappan

Prasanti Uppaluri

Raghav Babulnath

Vidyasagar Anantha

Thirupurasundari Jayaraman

Satya Kurada

Srikanth Kandukuri

Gangadharan Sivaraman

Methods and systems for creating a sample of defects for a specimen are provided. One method includes detecting defects on a specimen based on output generated by a detector of an output acquisition subsystem. For the defects detected in an array region on the specimen, where the array region includes multiple array cell types, the method includes stacking information for the defects based on the multiple array cell types. The stacking includes overlaying design information for only a first of the multiple array cell types with the information for only the defects detected in the first of the multiple array cell types. In addition, the method includes selecting a portion of the detected defects based on results of the stacking thereby creating a sample of the detected defects.

Creating defect samples for array regions

Growing community of inventors

Portland, OR, United States of America

Manikandan Mariyappan