Taiwan Semiconductor Manufacturing Comp. Ltd.

Manikandan Arumugam

Chien-Chih Chen

Kuo-Hsien Cheng

Mu-Han Cheng

Tsung-Yi Yang

Some implementations described herein provide a semiconductor structure. The semiconductor structure includes a first conductive structure disposed within a first layer of the semiconductor structure. The semiconductor structure includes a dielectric structure disposed within a second layer of the semiconductor structure, with the second layer being disposed on the first layer. The semiconductor structure includes a second conductive structure disposed within a recessed portion of the dielectric structure that extends to the first conductive structure, with the second conductive structure having a concave recessed portion on a top surface of the second conductive structure. The semiconductor structure includes multiple layers of conductive material disposed within the concave recessed portion of the second conductive structure.

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Tainan, Taiwan

Manikandan Arumugam