Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Maxim Integrated Gmbh

Manfred Weiss

Ulrich Hofmann

Joachim Janes

Peter Merz

Frank Senger

Volker Kempe

Thomas Von Wantoch

Christian Mallas

Oliver Schwarzelbach

Sascha Mühlmann

Lars Ratzmann

The present invention relates to a radiation imaging sensor with at least one detection element, which is implemented on a substrate as a micromechanical resonator and which absorbs the radiation to be detected. The resonator is set into a resonant oscillation with an excitation device and a shift in the resonance frequency of the detection element under exposure to radiation is detected with a detection device. The radiation sensor is characterized by the fact that it comprises a scanning device with a single-axis or multi-axis tiltable scanning element. The facility to tilt the device means that the detection element can be used to detect radiation from different directions. The imaging sensor can be realized in a compact manner and be economically produced.

Radiation imaging sensor

A method for activating a deflection device comprising at least one deflection unit, for a projection device for projecting trajectories upon a projection surface, wherein the deflection device deflects electromagnetic radiation which is directed upon it, for producing trajectories, and the at least one deflection unit is activated by way of an activation signal delivered from a control device, for producing oscillations in each case with a turning amplitude at a direction change of the oscillation, about at least one deflection axis, wherein in the case of resonance, the oscillations have a maximal amplitude, at which the produced trajectories reach an edge of the projection surface. The activation signal is set in a manner such that the turning amplitude of the oscillations at least temporarily has a predefined value outside a region of the maximal amplitude of the oscillations, and an intensity distribution of the produced trajectories on the projection surface is achieved with a predefined intensity pattern. The document moreover relates to a deflection device as well as to a projection device.

Method for activating a deflection device for a projection device, a deflection device for a projection device, and a projection device

The invention relates to a deflection device for a projection apparatus for projecting Lissajous figures onto an observation field which is made to deflect a light beam about at least one first and one second deflection axis for generating Lissajous figures having a deflection unit for producing oscillations about the deflection axes and having a control apparatus for producing control signals for the deflection unit having a first and second control frequency which substantially corresponds to the resonant frequencies of the deflection unit, wherein the deflection unit has a quality factor of &#x3e;3,000 and the control apparatus includes a feedback loop which is configured to regulate the first and/or second control frequencies in dependence on a measured phasing of the oscillations of the deflection unit so that the maximum amplitude of the oscillations remains in the resonant range of the deflection unit. The invention further relates to a projection apparatus having such a deflection device as well as to a method for controlling a corresponding deflection device.

Deflection device for a projection apparatus, projection apparatus for projecting an image and method for controlling a deflection apparatus for a projection apparatus

The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.

Micromechanical Coriolis rate of rotation sensor

A deflection device for a scanner with Lissajous scanning includes a micromirror that oscillates in at least two deflection axes and that includes a frame and a mirror plate that is movably arranged via a suspension mount. The deflection device also includes a control device for generating control signals for a resonant operation of the micromirror in the at least two deflection axes. The suspension mount includes at least one spring connected at one end to the mirror plate and at the other end to the frame. The frequencies of the control signals for the resonant operation of the micromirror are substantially equal in the at least two deflection axes, but differ at least in terms of the predefined scanning repetition rate. The levels of the resonance frequencies of the deflection axes and control signals are determined by a predefined scanning resolution and a predefined scanning repetition rate.

Deflection device for a scanner with Lissajous scanning

Exemplary embodiments relate to a sensor for detecting an acceleration acting on the sensor, having: a substrate, a mass unit, which acts as an inert mass in the event of the presence of an acceleration, a fixing structure, wherein the mass unit is articulated on the substrate in such a way that at least one pivot axis is defined, about which the mass unit can perform a rotation relative to the substrate as a result of an acceleration acting on the sensor, and the mass unit has an interial center of gravity, which is at a distance from the respective pivot axis, and at least one detection unit, with which a change in position between the mass unit and the substrate may be detected. The detection unit is arranged with respect to the mass unit in such a way that a deformation of the mass unit cannot be transferred to the detection unit.

Sensor for detecting acceleration

A rotation rate sensor for sensing a rotation &#x3a9; by which the sensor is rotated has a substrate and a driving and sensing arrangement located substantially flat in an X-Y plane above a substrate surface of the substrate and having a center. The driving and sensing arrangement has a drive mass and a sense mass that are arranged at different spacings from the center of the driving and sensing arrangement symmetrically about the center. The oscillation modes of the drive mass and the sense mass are partially transmittable onto one another and are partially decoupled. The rotation &#x3a9; is sensed in that a tilting of the sense mass out of a surface plane of the driving and sensing arrangement is sensed. A first one of the drive and sense masses that has a greater spacing to the center is tilted under the effect of Coriolis force out of the surface plane The first one of the drive and sense masses is connected by symmetrically arranged external anchors to the substrate such that a restoring action for the tilting action of the first one of the drive and sense masses is assisted by the external anchors.

Growing community of inventors

Itzehoe, Germany

Manfred Weiss