Leibniz-institut Fuer Festkoerper-und Werkstoffforschung Dresden E.v.

Carl-zeiss-stiftung Trading As Carl Zeiss

Leibniz-institut Fuer Festkoerper-und Werkstofforschung Dresden E.v.

Vectron International Gmbh & Co. Kg

Tele Filter Gmbh

Manfred Weihnacht

Guenter Martin

Sergey Biryukov

Hagen Schmidt

Bert Wall

Frank Höller

Martin Ross-Messemer

Alexander Menck

Günter Martin

Kurt Franke

Alexander Darinski

Siegfried Menzel

A transducer has natural unidirectionality for surface acoustic waves. An interdigital electrode structure is arranged on a piezoelectric crystal substrate and is constructed with interdigital transducers including collecting electrodes and fingers. At least two of the fingers form a transducer cell, which includes at least one excitation center for exciting an electrical potential wave and at least one reflection center for reflecting electrical potential waves. The fingers are oriented perpendicularly to a direction R parallel to a 1- or 3-fold rotational axis of the substrate crystal and the derivative dv/d&#x3b8;=0 applies to R, wherein v is the phase velocity of the surface wave and &#x3b8; is an angular deviation of the perpendicular to the finger direction from the direction R.

Transducer having natural unidirectionality for surface acoustic waves

The invention relates to waveguide components based on acoustic surface waves, comprising at least one interdigital converter for exciting acoustic surface waves in a piezoelectric substrate or a piezoelectric layer. The object of the invention is to change known waveguide components, comprising at least one interdigital converter for exciting acoustic surface waves in a piezoelectric substrate or a piezoelectric layer, such that no reflectors are necessary with an otherwise equivalent function. The inventive waveguide components are characterized in that the interdigital converter(s) a) is or are disposed at a defined distance over the piezoelectric substrate or the piezoelectric layer for exciting wave fields, or b) is or are in contact with the piezoelectric substrate or the piezoelectric layer, wherein in version a) the piezoelectric substrate is designed as a ring and the piezoelectric layer is designed as a circular region. In case of version b), the interdigital converter and/or the piezoelectric layer form circular regions. The components can be used for example as resonators, filters, oscillators and sensors.

Waveguide components on the basis of acoustic surface waves, and their use

An oscillator or a sensor comprising a unit including two frequency determining elements each of which comprises at least one interdigital converter for acoustic surface waves and a back-coupling circuit comprising an amplifier, wherein the frequency determining elements are distinguished by a temperature dependence of a synchronous frequency. The frequency determining elements are embodied in the form of acoustic surface wave resonators, and the temperature coefficients of n-th order of the synchronous frequency of the two acoustic surface wave resonators have different sings if they are not equal to zero and the temperature coefficients of (n+1st) order of the synchronous frequency of the two acoustic surface wave resonators have the same sign and the temperature coefficients from the first order to (n-1st) order of the synchronous frequency of the two acoustic surface wave resonators are equal to zero if n is greater than 1, wherein n being equal to or greater than 1, c) the ratio between the converter openings and the ratio between the lengths in the direction perpendicular to the edge teeth of the converter and to strips of the object reflectors having different frequency determining elements which are assembled in one unit are selected in such a way that the oscillator frequency variation is minimum within the range of given temperatures.

Oscillator with acoustic surface wave resonators

A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate, a surface wave sourceexcitable with an adjustable frequency for producing surface waves on a surfaceof the substrateand an interaction regionof the substrate surfacewhich is provided for the radiation to interact with a grating structure provided by the surface waves produced. To this end, the surface wave sourcemay have a directional characteristic and emits surface waves stronger in a preferred directionthan in a directionopposite thereto, the surface wave source may comprises an electro-acoustic transducer which includes spaced apart sections for emitting surface waves at different wavelengths, an electro-acoustic transducer of the surface wave source may be operated as a voltage divider with an intermediate electrode, the frequency for exciting the surface wave source may be adjusted in response to a measuring signal which is obtained by a surface wave receiver, a surface wave dampermay be provided in the form of an acousto-electric transducer, a closed propagation path may be provided for the surface waves and the grating structure may be formed by standing surface waves. Moreover, an exposure system is proposed which comprises such a diffraction-optical component and a radiation source.

Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system

An acoustic surface wave component for which metallic strip structures of copper are applied on a piezoelectric material wherein the metallic strip structures have a polycrystalline and/or monocrystalline structure and/or are present in an amorphous state and consist of a basic copper material to which 0 atom percent to a maximum of 10 atom percent of one or more other metallic elements, an alloy and/or a compound are mixed, and that the strip structures are coated with or surround by one or more diffusion barrier layers.

Acoustic surface wave component

Growing community of inventors

Malter, Germany

Manfred Weihnacht