Carl Zeiss Smt Gmbh

Jenoptik Laser, Optik, Systeme Gmbh

Jenoptik Optical Systems Gmbh

Manfred Steinbach

Armin Schoeppach

Thomas Schletterer

Andre Hillner

The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.

Optical device having a deformable optical element

In a precision mechanical-optical system, there is the problem of guaranteeing, for the production of a composite made from a plurality of mounted optical lenses, the mutual alignment of the optical axes during assembly and high strength of the composite after assembly with low expense in terms of equipment. Flanges are formed on the mounts for the optical elements, these flanges projecting outward in the radial direction and for adjacent mounts, abutting each other with facing joint surfaces, and are clamped by threaded connections tightening in the axial direction between paired, opposing bending elements.

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Jena, Germany

Manfred Steinbach