Brooks Automation Gmbh

Jenoptik Aktiengesellschaft

Manfred Heinze

Klaus Schultz

Berndt Lahne

Ulysses Gilchrist

Louise Smith Barriss

Joachim Konig

Harald Beckert

Hagen Raue

Steffen Kruger

Joachim König

Bjorn Zimmer

For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device () consists of a vertical drive mechanism () mounted on the wall element () and a sensor head () that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (), said sensor head being arranged so as to pivot on the vertical drive mechanism () in order to pivot into the opening (). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.

Device for the detection of substrates stacked with a specific spacing

A device for positioning disk-shaped objects () to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table () which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (). A fork-shaped frame () is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform () and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame () has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame () and about which a frame-shaped object holder () is mounted so as to be rotatable in the fork-shaped frame () for the purpose of turning the object. The frame-shaped object holder (), which carries the object in the edge region of the latter, surrounds a center through which passes a pivoting axis aligned parallel to the adjustment plane and intended for setting the angle of tilt of the second axis of rotation relative to the adjustment plane. Devices of this kind can be used to position flat objects in space for purposes of inspecting semiconductor wafers or flat panels.

Device for positioning disk-shaped objects

An arrangement for handling wafer-shaped objects is to ensure a high degree of positioning accuracy with increased productivity, freely selectable transport paths, and low mechanical expenditure under SMIF conditions. The arrangement has at least one indexing device for supplying and accepting the objects at a supplying and accepting location situated in a handling plane and at least one transporting device for transporting the wafer-shaped objects between the supplying and accepting location and a work station. The work station, together with at least one other work station, is arranged substantially coaxially to a central point through which passes a rotational axis of a changer. The arrangement is applicable in the manufacture of integrated circuits.

Arrangement for handling wafer-shaped objects

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Dresden, Germany

Manfred Heinze