Renesas Technology Corp.

Manabu Takata

Yoshiyuki Abe

Kazunari Suzuki

Chuichi Miyazaki

Toshihide Uematsu

Hideyuki Suga

Minoru Kimura

Masao Odagiri

A technique capable of stably releasing chips from a dicing tape, includes grinding a back surface of a semiconductor wafer, while adhering a pressure sensitive adhesive tape to a circuit forming surface of the semiconductor wafer formed with an integrated circuit, to achieve a predetermined thickness and forcibly oxidizing the back surface of the semiconductor wafer. Then, the pressure sensitive adhesive tape adhered to the circuit forming surface of the semiconductor wafer is released, and a dicing tape is adhered to the back surface of the semiconductor wafer. Further, the semiconductor wafer is divided by dicing it into individual chips, and then the back surface of the chip is pressed by way of the dicing tape, thereby releasing the chips from the dicing tape.

Fabrication method of semiconductor integrated circuit device

Growing community of inventors

Hamura, Japan

Manabu Takata