Nec Lcd Technologies, Ltd.

Manabu Oyama

Satoshi Ihida

Masaki Shinohara

Kyounei Yasuda

Yoshikazu Hatazawa

Jukoh Funaki

In a semi-transmission type liquid crystal display and a method for fabricating the same, a reflective electrode such as aluminum layer and a transparent electrode such as ITO film are used to form a pixel electrode that is provided on an organic film having an uneven surface. In order to effectively restrict the battery effect between a reflective electrode and a transparent electrode, a surface of the organic film is put in a plasma-processing and then is washed by a washing liquid. Thereafter, the transparent electrode is formed and then the reflective electrode such as a double layer electrode of the aluminum layer and the molybdenum layer are formed.

Method of fabricating a semi-transmission LCD by plasma processing and washing organic film, and LCD fabricated thereby

A method of fabricating a thin film transistor, includes the steps of (a) forming a gate electrode on an electrically insulating substrate, (b) forming a gate insulating film on the electrically insulating substrate, covering the gate electrode therewith, (c) forming a semiconductor layer on the gate insulating film above the gate electrode, (d) forming source and drain electrodes both making electrical contact with the semiconductor layer, (e) patterning the semiconductor layer into a channel, (f) applying first plasma to the semiconductor layer through the use of a first gas, and (g) applying second plasma to the semiconductor layer through the use of a second gas, and (h) forming an electrically insulating film covering the semiconductor layer therewith.

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Akita, Japan

Manabu Oyama